Mechanical properties of Al-3%Ti thin film for reliability analysis of RF MEMS switch

Jun Hyub Park, Yun Jae Kim, Sung Hoon Choa

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

This paper presents a novel experimental method to investigate the strength of material, Al-3%Ti, which is commonly used in RF(radio frequency) microelectromechanical systems(MEMS) switch. The experimental method involves the development of a new tensile loading system. The new tensile loading system has a load cell with maximum capacity of 0.5N and a non-contact position measuring system based on the principle of capacitance micrometry with 0.1 nm resolution for displacement measurement. A voice coil of audio speaker is used as the actuator of the loading system. And new specimen was designed and fabricated to easily manipulate, align and grip a thin-film for a tensile and fatigue test. The material used in this study was Al-3%Ti thin film, which was used in RF switch. The thickness and width of the thin film of specimen are 1.1 μn and 480μm, respectively. The holes at center of grip end are able to make alignment and gripping easy. The bridges are to remove the side supports easily and extract specimen from wafer without sawing. Tensile tests were performed on 5 specimens. The ultimate strength of Al-3%Ti was 144MPa.

Original languageEnglish
Pages (from-to)1319-1324
Number of pages6
JournalKey Engineering Materials
Volume306-308 II
Publication statusPublished - 2006 Mar 17
Externally publishedYes

Fingerprint

Reliability analysis
MEMS
Switches
Thin films
Mechanical properties
Sawing
Displacement measurement
Strength of materials
Capacitance
Actuators
Fatigue of materials

Keywords

  • Axial Loading
  • MEMS material
  • RF MEMS switch
  • Static property

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Mechanical properties of Al-3%Ti thin film for reliability analysis of RF MEMS switch. / Park, Jun Hyub; Kim, Yun Jae; Choa, Sung Hoon.

In: Key Engineering Materials, Vol. 306-308 II, 17.03.2006, p. 1319-1324.

Research output: Contribution to journalArticle

@article{57f9fef1029a45c0b26e63b0b154eb4d,
title = "Mechanical properties of Al-3{\%}Ti thin film for reliability analysis of RF MEMS switch",
abstract = "This paper presents a novel experimental method to investigate the strength of material, Al-3{\%}Ti, which is commonly used in RF(radio frequency) microelectromechanical systems(MEMS) switch. The experimental method involves the development of a new tensile loading system. The new tensile loading system has a load cell with maximum capacity of 0.5N and a non-contact position measuring system based on the principle of capacitance micrometry with 0.1 nm resolution for displacement measurement. A voice coil of audio speaker is used as the actuator of the loading system. And new specimen was designed and fabricated to easily manipulate, align and grip a thin-film for a tensile and fatigue test. The material used in this study was Al-3{\%}Ti thin film, which was used in RF switch. The thickness and width of the thin film of specimen are 1.1 μn and 480μm, respectively. The holes at center of grip end are able to make alignment and gripping easy. The bridges are to remove the side supports easily and extract specimen from wafer without sawing. Tensile tests were performed on 5 specimens. The ultimate strength of Al-3{\%}Ti was 144MPa.",
keywords = "Axial Loading, MEMS material, RF MEMS switch, Static property",
author = "Park, {Jun Hyub} and Kim, {Yun Jae} and Choa, {Sung Hoon}",
year = "2006",
month = "3",
day = "17",
language = "English",
volume = "306-308 II",
pages = "1319--1324",
journal = "Key Engineering Materials",
issn = "1013-9826",
publisher = "Trans Tech Publications",

}

TY - JOUR

T1 - Mechanical properties of Al-3%Ti thin film for reliability analysis of RF MEMS switch

AU - Park, Jun Hyub

AU - Kim, Yun Jae

AU - Choa, Sung Hoon

PY - 2006/3/17

Y1 - 2006/3/17

N2 - This paper presents a novel experimental method to investigate the strength of material, Al-3%Ti, which is commonly used in RF(radio frequency) microelectromechanical systems(MEMS) switch. The experimental method involves the development of a new tensile loading system. The new tensile loading system has a load cell with maximum capacity of 0.5N and a non-contact position measuring system based on the principle of capacitance micrometry with 0.1 nm resolution for displacement measurement. A voice coil of audio speaker is used as the actuator of the loading system. And new specimen was designed and fabricated to easily manipulate, align and grip a thin-film for a tensile and fatigue test. The material used in this study was Al-3%Ti thin film, which was used in RF switch. The thickness and width of the thin film of specimen are 1.1 μn and 480μm, respectively. The holes at center of grip end are able to make alignment and gripping easy. The bridges are to remove the side supports easily and extract specimen from wafer without sawing. Tensile tests were performed on 5 specimens. The ultimate strength of Al-3%Ti was 144MPa.

AB - This paper presents a novel experimental method to investigate the strength of material, Al-3%Ti, which is commonly used in RF(radio frequency) microelectromechanical systems(MEMS) switch. The experimental method involves the development of a new tensile loading system. The new tensile loading system has a load cell with maximum capacity of 0.5N and a non-contact position measuring system based on the principle of capacitance micrometry with 0.1 nm resolution for displacement measurement. A voice coil of audio speaker is used as the actuator of the loading system. And new specimen was designed and fabricated to easily manipulate, align and grip a thin-film for a tensile and fatigue test. The material used in this study was Al-3%Ti thin film, which was used in RF switch. The thickness and width of the thin film of specimen are 1.1 μn and 480μm, respectively. The holes at center of grip end are able to make alignment and gripping easy. The bridges are to remove the side supports easily and extract specimen from wafer without sawing. Tensile tests were performed on 5 specimens. The ultimate strength of Al-3%Ti was 144MPa.

KW - Axial Loading

KW - MEMS material

KW - RF MEMS switch

KW - Static property

UR - http://www.scopus.com/inward/record.url?scp=33644860497&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33644860497&partnerID=8YFLogxK

M3 - Article

VL - 306-308 II

SP - 1319

EP - 1324

JO - Key Engineering Materials

JF - Key Engineering Materials

SN - 1013-9826

ER -