Mechanical properties of few layer graphene cantilever

Kazuma Matsui, Akira Inaba, Yuta Oshidari, Yusuke Takei, Hidetoshi Takahashi, Tomoyuki Takahata, Reo Kometani, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

10 Citations (Scopus)

Abstract

We report the resonant frequency measurement of few-layer (1-, 2-, and 3-layer) graphene (FLG) cantilevers by optical heterodyne interferometry. The micro-sized FLG cantilevers with and without the diamond-like carbon weights were fabricated using focused ion beam. The Young's modulus was able to be calculated from the measured resonant frequency. The calculated Young's modulus was larger than the literature data [1]. This result suggests that the overlapped structure of the FLG cantilever makes the structure rigid.

Original languageEnglish
Title of host publicationMEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1087-1090
Number of pages4
ISBN (Print)9781479935086
DOIs
Publication statusPublished - 2014 Jan 1
Externally publishedYes
Event27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States
Duration: 2014 Jan 262014 Jan 30

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
CountryUnited States
CitySan Francisco, CA
Period14/1/2614/1/30

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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