Mechanical properties of few layer graphene cantilever

Kazuma Matsui, Akira Inaba, Yuta Oshidari, Yusuke Takei, Hidetoshi Takahashi, Tomoyuki Takahata, Reo Kometani, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

We report the resonant frequency measurement of few-layer (1-, 2-, and 3-layer) graphene (FLG) cantilevers by optical heterodyne interferometry. The micro-sized FLG cantilevers with and without the diamond-like carbon weights were fabricated using focused ion beam. The Young's modulus was able to be calculated from the measured resonant frequency. The calculated Young's modulus was larger than the literature data [1]. This result suggests that the overlapped structure of the FLG cantilever makes the structure rigid.

Original languageEnglish
Title of host publicationMEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1087-1090
Number of pages4
ISBN (Print)9781479935086
DOIs
Publication statusPublished - 2014 Jan 1
Externally publishedYes
Event27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States
Duration: 2014 Jan 262014 Jan 30

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

Other27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
CountryUnited States
CitySan Francisco, CA
Period14/1/2614/1/30

Fingerprint

Graphite
Graphene
resonant frequencies
Natural frequencies
modulus of elasticity
graphene
Elastic moduli
mechanical properties
Rigid structures
Mechanical properties
Diamond
Focused ion beams
frequency measurement
rigid structures
Interferometry
Diamonds
interferometry
Carbon
diamonds
ion beams

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Matsui, K., Inaba, A., Oshidari, Y., Takei, Y., Takahashi, H., Takahata, T., ... Shimoyama, I. (2014). Mechanical properties of few layer graphene cantilever. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems (pp. 1087-1090). [6765834] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2014.6765834

Mechanical properties of few layer graphene cantilever. / Matsui, Kazuma; Inaba, Akira; Oshidari, Yuta; Takei, Yusuke; Takahashi, Hidetoshi; Takahata, Tomoyuki; Kometani, Reo; Matsumoto, Kiyoshi; Shimoyama, Isao.

MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. p. 1087-1090 6765834 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Matsui, K, Inaba, A, Oshidari, Y, Takei, Y, Takahashi, H, Takahata, T, Kometani, R, Matsumoto, K & Shimoyama, I 2014, Mechanical properties of few layer graphene cantilever. in MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems., 6765834, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 1087-1090, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, San Francisco, CA, United States, 14/1/26. https://doi.org/10.1109/MEMSYS.2014.6765834
Matsui K, Inaba A, Oshidari Y, Takei Y, Takahashi H, Takahata T et al. Mechanical properties of few layer graphene cantilever. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2014. p. 1087-1090. 6765834. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2014.6765834
Matsui, Kazuma ; Inaba, Akira ; Oshidari, Yuta ; Takei, Yusuke ; Takahashi, Hidetoshi ; Takahata, Tomoyuki ; Kometani, Reo ; Matsumoto, Kiyoshi ; Shimoyama, Isao. / Mechanical properties of few layer graphene cantilever. MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 1087-1090 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).
@inproceedings{824087995c0146d59d9b89d4fe7a6f3f,
title = "Mechanical properties of few layer graphene cantilever",
abstract = "We report the resonant frequency measurement of few-layer (1-, 2-, and 3-layer) graphene (FLG) cantilevers by optical heterodyne interferometry. The micro-sized FLG cantilevers with and without the diamond-like carbon weights were fabricated using focused ion beam. The Young's modulus was able to be calculated from the measured resonant frequency. The calculated Young's modulus was larger than the literature data [1]. This result suggests that the overlapped structure of the FLG cantilever makes the structure rigid.",
author = "Kazuma Matsui and Akira Inaba and Yuta Oshidari and Yusuke Takei and Hidetoshi Takahashi and Tomoyuki Takahata and Reo Kometani and Kiyoshi Matsumoto and Isao Shimoyama",
year = "2014",
month = "1",
day = "1",
doi = "10.1109/MEMSYS.2014.6765834",
language = "English",
isbn = "9781479935086",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1087--1090",
booktitle = "MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems",

}

TY - GEN

T1 - Mechanical properties of few layer graphene cantilever

AU - Matsui, Kazuma

AU - Inaba, Akira

AU - Oshidari, Yuta

AU - Takei, Yusuke

AU - Takahashi, Hidetoshi

AU - Takahata, Tomoyuki

AU - Kometani, Reo

AU - Matsumoto, Kiyoshi

AU - Shimoyama, Isao

PY - 2014/1/1

Y1 - 2014/1/1

N2 - We report the resonant frequency measurement of few-layer (1-, 2-, and 3-layer) graphene (FLG) cantilevers by optical heterodyne interferometry. The micro-sized FLG cantilevers with and without the diamond-like carbon weights were fabricated using focused ion beam. The Young's modulus was able to be calculated from the measured resonant frequency. The calculated Young's modulus was larger than the literature data [1]. This result suggests that the overlapped structure of the FLG cantilever makes the structure rigid.

AB - We report the resonant frequency measurement of few-layer (1-, 2-, and 3-layer) graphene (FLG) cantilevers by optical heterodyne interferometry. The micro-sized FLG cantilevers with and without the diamond-like carbon weights were fabricated using focused ion beam. The Young's modulus was able to be calculated from the measured resonant frequency. The calculated Young's modulus was larger than the literature data [1]. This result suggests that the overlapped structure of the FLG cantilever makes the structure rigid.

UR - http://www.scopus.com/inward/record.url?scp=84898983066&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84898983066&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2014.6765834

DO - 10.1109/MEMSYS.2014.6765834

M3 - Conference contribution

AN - SCOPUS:84898983066

SN - 9781479935086

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 1087

EP - 1090

BT - MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems

PB - Institute of Electrical and Electronics Engineers Inc.

ER -