Abstract
Micro-grooves were machined onto a single-crystal diamond surface by laser irradiation with a nanosecond pulse, and the resulting damage was investigated. The causes of four different forms of damage have been identified and examined; cracking, ripple formation, groove shape deformation and debris deposition. Cracking is caused by a rapid temperature change; ripples by interference of the laser reflected from the groove walls; groove shape deformation by enhanced absorption of the laser-induced plasma; deposited ablation debris by two different ablation regimes. Cracking and shape deformation is reduced at the center of the groove, which is very smooth and ripple-free for line irradiations using a single pass. These results provide useful information for reducing the laser-induced damage in diamond and creating damage-free micro-grooved diamond cutting tools.
Original language | English |
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Pages (from-to) | 299-311 |
Number of pages | 13 |
Journal | Journal of Materials Processing Technology |
Volume | 243 |
DOIs | |
Publication status | Published - 2017 May 1 |
Keywords
- Groove formation
- Laser processing
- Micromachining
- Nd:YAG laser
- Single-crystal diamond
- Surface microstructure
- Thermal ablation
ASJC Scopus subject areas
- Ceramics and Composites
- Modelling and Simulation
- Computer Science Applications
- Metals and Alloys
- Industrial and Manufacturing Engineering