MEMS-based hydraulic displacement amplification mechanism with completely encapsulated liquid

T. Ninomiya, Y. Okayama, Yoshinori Matsumoto, X. Arouette, K. Osawa, Norihisa Miki

Research output: Contribution to journalArticle

39 Citations (Scopus)

Abstract

We developed a MEMS-based hydraulic displacement amplification mechanism (HDAM) with completely encapsulated liquid that can be used in applications that require large-displacement micro-actuators, such as tactile displays and microvalves controlling large mass flows. The HDAM contains a microcavity that is sealed by easily deformable thin polydimethylsiloxane (PDMS) membranes encapsulating an incompressible fluid and whose input and output surfaces have different cross-sectional areas. A displacement applied to the input surface is amplified at the smaller output surface. We patterned silicon wafers, bonded them to form the microcavity, and encapsulated glycerin within the microcavity by using ultraviolet curable resin as an intermediate layer and bonding easily deformable thin PDMS membranes to the silicon structure in a glycerin solution. This bonding-in-solution approach ensures that the encapsulated glycerin is bubble-free. We obtained fifteen-fold of amplification of the input displacement applied by a piezoelectric actuator and demonstrated a 3 × 3 array of actuators displaying rewritable Braille cells.

Original languageEnglish
Pages (from-to)277-282
Number of pages6
JournalSensors and Actuators, A: Physical
Volume166
Issue number2
DOIs
Publication statusPublished - 2011 Apr

Fingerprint

Microcavities
Glycerol
hydraulics
microelectromechanical systems
MEMS
Amplification
Hydraulics
Polydimethylsiloxane
Liquids
Actuators
liquids
Membranes
Piezoelectric actuators
Silicon
Bubbles (in fluids)
Silicon wafers
braille
actuators
membranes
Resins

Keywords

  • Bonding
  • Hydraulic amplification
  • Large displacement
  • Liquid encapsulation
  • MEMS
  • Tactile display

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials
  • Metals and Alloys
  • Surfaces, Coatings and Films
  • Instrumentation

Cite this

MEMS-based hydraulic displacement amplification mechanism with completely encapsulated liquid. / Ninomiya, T.; Okayama, Y.; Matsumoto, Yoshinori; Arouette, X.; Osawa, K.; Miki, Norihisa.

In: Sensors and Actuators, A: Physical, Vol. 166, No. 2, 04.2011, p. 277-282.

Research output: Contribution to journalArticle

@article{fadd2a70c07f49e983d507acba153e42,
title = "MEMS-based hydraulic displacement amplification mechanism with completely encapsulated liquid",
abstract = "We developed a MEMS-based hydraulic displacement amplification mechanism (HDAM) with completely encapsulated liquid that can be used in applications that require large-displacement micro-actuators, such as tactile displays and microvalves controlling large mass flows. The HDAM contains a microcavity that is sealed by easily deformable thin polydimethylsiloxane (PDMS) membranes encapsulating an incompressible fluid and whose input and output surfaces have different cross-sectional areas. A displacement applied to the input surface is amplified at the smaller output surface. We patterned silicon wafers, bonded them to form the microcavity, and encapsulated glycerin within the microcavity by using ultraviolet curable resin as an intermediate layer and bonding easily deformable thin PDMS membranes to the silicon structure in a glycerin solution. This bonding-in-solution approach ensures that the encapsulated glycerin is bubble-free. We obtained fifteen-fold of amplification of the input displacement applied by a piezoelectric actuator and demonstrated a 3 × 3 array of actuators displaying rewritable Braille cells.",
keywords = "Bonding, Hydraulic amplification, Large displacement, Liquid encapsulation, MEMS, Tactile display",
author = "T. Ninomiya and Y. Okayama and Yoshinori Matsumoto and X. Arouette and K. Osawa and Norihisa Miki",
year = "2011",
month = "4",
doi = "10.1016/j.sna.2009.07.002",
language = "English",
volume = "166",
pages = "277--282",
journal = "Sensors and Actuators, A: Physical",
issn = "0924-4247",
publisher = "Elsevier",
number = "2",

}

TY - JOUR

T1 - MEMS-based hydraulic displacement amplification mechanism with completely encapsulated liquid

AU - Ninomiya, T.

AU - Okayama, Y.

AU - Matsumoto, Yoshinori

AU - Arouette, X.

AU - Osawa, K.

AU - Miki, Norihisa

PY - 2011/4

Y1 - 2011/4

N2 - We developed a MEMS-based hydraulic displacement amplification mechanism (HDAM) with completely encapsulated liquid that can be used in applications that require large-displacement micro-actuators, such as tactile displays and microvalves controlling large mass flows. The HDAM contains a microcavity that is sealed by easily deformable thin polydimethylsiloxane (PDMS) membranes encapsulating an incompressible fluid and whose input and output surfaces have different cross-sectional areas. A displacement applied to the input surface is amplified at the smaller output surface. We patterned silicon wafers, bonded them to form the microcavity, and encapsulated glycerin within the microcavity by using ultraviolet curable resin as an intermediate layer and bonding easily deformable thin PDMS membranes to the silicon structure in a glycerin solution. This bonding-in-solution approach ensures that the encapsulated glycerin is bubble-free. We obtained fifteen-fold of amplification of the input displacement applied by a piezoelectric actuator and demonstrated a 3 × 3 array of actuators displaying rewritable Braille cells.

AB - We developed a MEMS-based hydraulic displacement amplification mechanism (HDAM) with completely encapsulated liquid that can be used in applications that require large-displacement micro-actuators, such as tactile displays and microvalves controlling large mass flows. The HDAM contains a microcavity that is sealed by easily deformable thin polydimethylsiloxane (PDMS) membranes encapsulating an incompressible fluid and whose input and output surfaces have different cross-sectional areas. A displacement applied to the input surface is amplified at the smaller output surface. We patterned silicon wafers, bonded them to form the microcavity, and encapsulated glycerin within the microcavity by using ultraviolet curable resin as an intermediate layer and bonding easily deformable thin PDMS membranes to the silicon structure in a glycerin solution. This bonding-in-solution approach ensures that the encapsulated glycerin is bubble-free. We obtained fifteen-fold of amplification of the input displacement applied by a piezoelectric actuator and demonstrated a 3 × 3 array of actuators displaying rewritable Braille cells.

KW - Bonding

KW - Hydraulic amplification

KW - Large displacement

KW - Liquid encapsulation

KW - MEMS

KW - Tactile display

UR - http://www.scopus.com/inward/record.url?scp=79952536723&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79952536723&partnerID=8YFLogxK

U2 - 10.1016/j.sna.2009.07.002

DO - 10.1016/j.sna.2009.07.002

M3 - Article

AN - SCOPUS:79952536723

VL - 166

SP - 277

EP - 282

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

SN - 0924-4247

IS - 2

ER -