TY - JOUR
T1 - MEMS-based hydraulic displacement amplification mechanism with completely encapsulated liquid
AU - Ninomiya, T.
AU - Okayama, Y.
AU - Matsumoto, Y.
AU - Arouette, X.
AU - Osawa, K.
AU - Miki, N.
N1 - Funding Information:
This work was supported in part by the New Energy and Industrial Technology Development Organization (NEDO), Fine MEMS project, in part by the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Grant-in-Aid for Young Scientists (B) (21760202), and in part by the Ministry of Internal Affairs and Communications (MIC), Strategic Information and Communications R&D Promotion Programme (SCOPE) (092103005).
PY - 2011/4
Y1 - 2011/4
N2 - We developed a MEMS-based hydraulic displacement amplification mechanism (HDAM) with completely encapsulated liquid that can be used in applications that require large-displacement micro-actuators, such as tactile displays and microvalves controlling large mass flows. The HDAM contains a microcavity that is sealed by easily deformable thin polydimethylsiloxane (PDMS) membranes encapsulating an incompressible fluid and whose input and output surfaces have different cross-sectional areas. A displacement applied to the input surface is amplified at the smaller output surface. We patterned silicon wafers, bonded them to form the microcavity, and encapsulated glycerin within the microcavity by using ultraviolet curable resin as an intermediate layer and bonding easily deformable thin PDMS membranes to the silicon structure in a glycerin solution. This bonding-in-solution approach ensures that the encapsulated glycerin is bubble-free. We obtained fifteen-fold of amplification of the input displacement applied by a piezoelectric actuator and demonstrated a 3 × 3 array of actuators displaying rewritable Braille cells.
AB - We developed a MEMS-based hydraulic displacement amplification mechanism (HDAM) with completely encapsulated liquid that can be used in applications that require large-displacement micro-actuators, such as tactile displays and microvalves controlling large mass flows. The HDAM contains a microcavity that is sealed by easily deformable thin polydimethylsiloxane (PDMS) membranes encapsulating an incompressible fluid and whose input and output surfaces have different cross-sectional areas. A displacement applied to the input surface is amplified at the smaller output surface. We patterned silicon wafers, bonded them to form the microcavity, and encapsulated glycerin within the microcavity by using ultraviolet curable resin as an intermediate layer and bonding easily deformable thin PDMS membranes to the silicon structure in a glycerin solution. This bonding-in-solution approach ensures that the encapsulated glycerin is bubble-free. We obtained fifteen-fold of amplification of the input displacement applied by a piezoelectric actuator and demonstrated a 3 × 3 array of actuators displaying rewritable Braille cells.
KW - Bonding
KW - Hydraulic amplification
KW - Large displacement
KW - Liquid encapsulation
KW - MEMS
KW - Tactile display
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U2 - 10.1016/j.sna.2009.07.002
DO - 10.1016/j.sna.2009.07.002
M3 - Article
AN - SCOPUS:79952536723
SN - 0924-4247
VL - 166
SP - 277
EP - 282
JO - Sensors and Actuators A: Physical
JF - Sensors and Actuators A: Physical
IS - 2
ER -