MEMS-based tactile displays

Hiroki Ishizuka, Norihisa Miki

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

This paper discusses state-of-the-art tactile displays fabricated by a micro-electronic-mechanical-system (MEMS). A tactile display conveys tactile sensations to users by using actuators. Traditional tactile displays consist of large size actuators, such as a motor or an ultrasound vibrator, to convey tactile feedback by vibration. In addition, the tactile sensation of traditional displays has poor resolution. Microelectromechanical system (MEMS) technology, which is a miniature fabrication process, enables etching, sputtering and assembling of miniature structures. Recently, the technology was applied to tactile displays. For example, shape memory alloy (SMA) actuators are widely used in tactile displays to convey roughness or vibration. The actuators are fabricated by a sputtering process and then thinned. The displays convey various tactile sensations, including feedback and tactile sensations of objects such as paper or wood. This paper is a review of tactile displays fabricated by MEMS technology. We also describe the fabrication processes and stimulation methods to present the potential and applications of the displays.

Original languageEnglish
Pages (from-to)25-32
Number of pages8
JournalDisplays
Volume37
DOIs
Publication statusPublished - 2015

Fingerprint

Microelectronics
Display devices
Actuators
Sputtering
Feedback
Fabrication
Vibrators
Shape memory effect
Vibrations (mechanical)
MEMS
Etching
Wood
Ultrasonics
Surface roughness

Keywords

  • Actuators
  • Mechanoreceptors
  • MEMS
  • Smart materials
  • Tactile display

ASJC Scopus subject areas

  • Human-Computer Interaction
  • Electrical and Electronic Engineering
  • Hardware and Architecture

Cite this

MEMS-based tactile displays. / Ishizuka, Hiroki; Miki, Norihisa.

In: Displays, Vol. 37, 2015, p. 25-32.

Research output: Contribution to journalArticle

Ishizuka, Hiroki ; Miki, Norihisa. / MEMS-based tactile displays. In: Displays. 2015 ; Vol. 37. pp. 25-32.
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