MEMS force and displacement sensor for measuring spring constant of hydrogel microparticles

S. Kohyama; H. Takahashi; S. Yoshida; H. Onoe; K. H. Shoji; T. Tsukagoshi; T. Takahata; I. Shimoyama

doi:10.1109/MEMSYS.2017.7863590

MEMS force and displacement sensor for measuring spring constant of hydrogel microparticles

S. Kohyama, H. Takahashi, S. Yoshida, H. Onoe, K. H. Shoji, T. Tsukagoshi, T. Takahata, I. Shimoyama

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

5 Citations (Scopus)

Abstract

This paper reports on a method to measure spring constant of hydrogel microparticles by a MEMS sensor. For calculating spring constant, not only force but also displacement is necessary. The MEMS sensor consists of two sidewall doped piezoresistive cantilevers in the ranges of μΝ and μm so that both parameters can be measured simultaneously. When one cantilever pushes a target to a wall, the cantilever can measure the restoring force of the target. At the same time, the other cantilever measures the displacement by pushing the wall directly. By measuring both force and displacement on the same sensor chip, the spring constant of targets can be obtained only from the sensor outputs, which makes the sensor system simple and compact. With this advantage, our method can be useful in actual experiments with microscopes and other systems.

Original language	English
Title of host publication	2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1040-1043
Number of pages	4
ISBN (Electronic)	9781509050789
DOIs	https://doi.org/10.1109/MEMSYS.2017.7863590
Publication status	Published - 2017 Feb 23
Event	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States Duration: 2017 Jan 22 → 2017 Jan 26

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Country/Territory	United States
City	Las Vegas
Period	17/1/22 → 17/1/26

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2017.7863590

Cite this

Kohyama, S., Takahashi, H., Yoshida, S., Onoe, H., Shoji, K. H., Tsukagoshi, T., Takahata, T., & Shimoyama, I. (2017). MEMS force and displacement sensor for measuring spring constant of hydrogel microparticles. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 1040-1043). [7863590] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863590

MEMS force and displacement sensor for measuring spring constant of hydrogel microparticles. / Kohyama, S.; Takahashi, H.; Yoshida, S. et al.

2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 1040-1043 7863590 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kohyama, S, Takahashi, H, Yoshida, S, Onoe, H, Shoji, KH, Tsukagoshi, T, Takahata, T & Shimoyama, I 2017, MEMS force and displacement sensor for measuring spring constant of hydrogel microparticles. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863590, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 1040-1043, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, United States, 17/1/22. https://doi.org/10.1109/MEMSYS.2017.7863590

Kohyama S, Takahashi H, Yoshida S, Onoe H, Shoji KH, Tsukagoshi T et al. MEMS force and displacement sensor for measuring spring constant of hydrogel microparticles. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 1040-1043. 7863590. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2017.7863590

Kohyama, S. ; Takahashi, H. ; Yoshida, S. et al. / MEMS force and displacement sensor for measuring spring constant of hydrogel microparticles. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 1040-1043 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{b6ab5e3071074f1aa462aec457f27193,

title = "MEMS force and displacement sensor for measuring spring constant of hydrogel microparticles",

abstract = "This paper reports on a method to measure spring constant of hydrogel microparticles by a MEMS sensor. For calculating spring constant, not only force but also displacement is necessary. The MEMS sensor consists of two sidewall doped piezoresistive cantilevers in the ranges of μΝ and μm so that both parameters can be measured simultaneously. When one cantilever pushes a target to a wall, the cantilever can measure the restoring force of the target. At the same time, the other cantilever measures the displacement by pushing the wall directly. By measuring both force and displacement on the same sensor chip, the spring constant of targets can be obtained only from the sensor outputs, which makes the sensor system simple and compact. With this advantage, our method can be useful in actual experiments with microscopes and other systems.",

author = "S. Kohyama and H. Takahashi and S. Yoshida and H. Onoe and Shoji, {K. H.} and T. Tsukagoshi and T. Takahata and I. Shimoyama",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 ; Conference date: 22-01-2017 Through 26-01-2017",

year = "2017",

month = feb,

day = "23",

doi = "10.1109/MEMSYS.2017.7863590",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1040--1043",

booktitle = "2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017",

}

TY - GEN

T1 - MEMS force and displacement sensor for measuring spring constant of hydrogel microparticles

AU - Kohyama, S.

AU - Takahashi, H.

AU - Yoshida, S.

AU - Onoe, H.

AU - Shoji, K. H.

AU - Tsukagoshi, T.

AU - Takahata, T.

AU - Shimoyama, I.

PY - 2017/2/23

Y1 - 2017/2/23

N2 - This paper reports on a method to measure spring constant of hydrogel microparticles by a MEMS sensor. For calculating spring constant, not only force but also displacement is necessary. The MEMS sensor consists of two sidewall doped piezoresistive cantilevers in the ranges of μΝ and μm so that both parameters can be measured simultaneously. When one cantilever pushes a target to a wall, the cantilever can measure the restoring force of the target. At the same time, the other cantilever measures the displacement by pushing the wall directly. By measuring both force and displacement on the same sensor chip, the spring constant of targets can be obtained only from the sensor outputs, which makes the sensor system simple and compact. With this advantage, our method can be useful in actual experiments with microscopes and other systems.

AB - This paper reports on a method to measure spring constant of hydrogel microparticles by a MEMS sensor. For calculating spring constant, not only force but also displacement is necessary. The MEMS sensor consists of two sidewall doped piezoresistive cantilevers in the ranges of μΝ and μm so that both parameters can be measured simultaneously. When one cantilever pushes a target to a wall, the cantilever can measure the restoring force of the target. At the same time, the other cantilever measures the displacement by pushing the wall directly. By measuring both force and displacement on the same sensor chip, the spring constant of targets can be obtained only from the sensor outputs, which makes the sensor system simple and compact. With this advantage, our method can be useful in actual experiments with microscopes and other systems.

UR - http://www.scopus.com/inward/record.url?scp=85015772831&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85015772831&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2017.7863590

DO - 10.1109/MEMSYS.2017.7863590

M3 - Conference contribution

AN - SCOPUS:85015772831

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 1040

EP - 1043

BT - 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017

Y2 - 22 January 2017 through 26 January 2017

ER -

MEMS force and displacement sensor for measuring spring constant of hydrogel microparticles

Abstract

Publication series

Other

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this