MEMS microphone with a micro Helmholtz resonator

Hidetoshi Takahashi, Akira Suzuki, Eiji Iwase, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

This paper reports on the development of a micro electro mechanical system microphone consisting of a piezoresistive cantilever and a micro HR (Helmholtz resonator) for use as an ultrasonic proximity sensor. The resonance frequency of the HR was designed to be equal to that of the cantilever. Therefore, the HR increases the sensitivity of the microphone to ultrasonic waves. The dimensions of the fabricated HR and the cantilever are 1.2mm×1.2mm×0.6mm and 130m×40m×0.3m, respectively. At a resonance frequency of 22.6kHz, the cantilever with the HR detected ultrasonic waves with 14times greater sensitivity than that of the cantilever without the HR. We demonstrated that the fabricated sensor is capable of measuring distances between 0.5 and 6.0m.

Original languageEnglish
Article number085019
JournalJournal of Micromechanics and Microengineering
Volume22
Issue number8
DOIs
Publication statusPublished - 2012 Aug 1
Externally publishedYes

Fingerprint

Microphones
MEMS
Resonators
Ultrasonic waves
Proximity sensors
Ultrasonic sensors
Sensors

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

MEMS microphone with a micro Helmholtz resonator. / Takahashi, Hidetoshi; Suzuki, Akira; Iwase, Eiji; Matsumoto, Kiyoshi; Shimoyama, Isao.

In: Journal of Micromechanics and Microengineering, Vol. 22, No. 8, 085019, 01.08.2012.

Research output: Contribution to journalArticle

Takahashi, Hidetoshi ; Suzuki, Akira ; Iwase, Eiji ; Matsumoto, Kiyoshi ; Shimoyama, Isao. / MEMS microphone with a micro Helmholtz resonator. In: Journal of Micromechanics and Microengineering. 2012 ; Vol. 22, No. 8.
@article{20d95ba89f394724af6768da8943105e,
title = "MEMS microphone with a micro Helmholtz resonator",
abstract = "This paper reports on the development of a micro electro mechanical system microphone consisting of a piezoresistive cantilever and a micro HR (Helmholtz resonator) for use as an ultrasonic proximity sensor. The resonance frequency of the HR was designed to be equal to that of the cantilever. Therefore, the HR increases the sensitivity of the microphone to ultrasonic waves. The dimensions of the fabricated HR and the cantilever are 1.2mm×1.2mm×0.6mm and 130m×40m×0.3m, respectively. At a resonance frequency of 22.6kHz, the cantilever with the HR detected ultrasonic waves with 14times greater sensitivity than that of the cantilever without the HR. We demonstrated that the fabricated sensor is capable of measuring distances between 0.5 and 6.0m.",
author = "Hidetoshi Takahashi and Akira Suzuki and Eiji Iwase and Kiyoshi Matsumoto and Isao Shimoyama",
year = "2012",
month = "8",
day = "1",
doi = "10.1088/0960-1317/22/8/085019",
language = "English",
volume = "22",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "IOP Publishing Ltd.",
number = "8",

}

TY - JOUR

T1 - MEMS microphone with a micro Helmholtz resonator

AU - Takahashi, Hidetoshi

AU - Suzuki, Akira

AU - Iwase, Eiji

AU - Matsumoto, Kiyoshi

AU - Shimoyama, Isao

PY - 2012/8/1

Y1 - 2012/8/1

N2 - This paper reports on the development of a micro electro mechanical system microphone consisting of a piezoresistive cantilever and a micro HR (Helmholtz resonator) for use as an ultrasonic proximity sensor. The resonance frequency of the HR was designed to be equal to that of the cantilever. Therefore, the HR increases the sensitivity of the microphone to ultrasonic waves. The dimensions of the fabricated HR and the cantilever are 1.2mm×1.2mm×0.6mm and 130m×40m×0.3m, respectively. At a resonance frequency of 22.6kHz, the cantilever with the HR detected ultrasonic waves with 14times greater sensitivity than that of the cantilever without the HR. We demonstrated that the fabricated sensor is capable of measuring distances between 0.5 and 6.0m.

AB - This paper reports on the development of a micro electro mechanical system microphone consisting of a piezoresistive cantilever and a micro HR (Helmholtz resonator) for use as an ultrasonic proximity sensor. The resonance frequency of the HR was designed to be equal to that of the cantilever. Therefore, the HR increases the sensitivity of the microphone to ultrasonic waves. The dimensions of the fabricated HR and the cantilever are 1.2mm×1.2mm×0.6mm and 130m×40m×0.3m, respectively. At a resonance frequency of 22.6kHz, the cantilever with the HR detected ultrasonic waves with 14times greater sensitivity than that of the cantilever without the HR. We demonstrated that the fabricated sensor is capable of measuring distances between 0.5 and 6.0m.

UR - http://www.scopus.com/inward/record.url?scp=84864488945&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84864488945&partnerID=8YFLogxK

U2 - 10.1088/0960-1317/22/8/085019

DO - 10.1088/0960-1317/22/8/085019

M3 - Article

AN - SCOPUS:84864488945

VL - 22

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 8

M1 - 085019

ER -