MEMS mirror with slot structures suitable for flexible-grid WSS

Keisuke Sorimoto, Hitoshi Kawashima, Masahiko Mori, Toshifumi Hasama, Hiroshi Ishikawa, Hiroyuki Tsuda, Hisato Uetsuka

    Research output: Contribution to journalArticle

    2 Citations (Scopus)

    Abstract

    We propose a microelectromechanical system (MEMS) mirror design, which is suitable for use in a flexible-grid wavelength selective switch (WSS). In the flexible grid operation with a conventional MEMS-based WSS, the diffraction loss at the inter-mirror gap regions caused a large ripple in the transmission spectra. On the other hand, the newly introduced slot structures in each mirror can reduce the ripples by intentionally attenuating the light on the mirrors to equalize the reflectance of the entire mirrors. We optimize the slot structure aiming for the flexible-grid WSS operation with a bandwidth-granularity of 12.5 GHz. The ripples are successfully reduced to below 0.004 dB with a loss penalty of only 1.05 dB.

    Original languageEnglish
    Article number20120924
    JournalIEICE Electronics Express
    Volume10
    Issue number3
    DOIs
    Publication statusPublished - 2013 Jan 1

    Keywords

    • Flexible grid
    • Microelectromechanical system (MEMS)
    • Slot structure
    • Wavelength selective switch (WSS)

    ASJC Scopus subject areas

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Electrical and Electronic Engineering

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  • Cite this

    Sorimoto, K., Kawashima, H., Mori, M., Hasama, T., Ishikawa, H., Tsuda, H., & Uetsuka, H. (2013). MEMS mirror with slot structures suitable for flexible-grid WSS. IEICE Electronics Express, 10(3), [20120924]. https://doi.org/10.1587/elex.10.20120924