MEMS mirror with slot structures suitable for flexible-grid WSS

Keisuke Sorimoto, Hitoshi Kawashima, Masahiko Mori, Toshifumi Hasama, Hiroshi Ishikawa, Hiroyuki Tsuda, Hisato Uetsuka

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

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Physics & Astronomy

Chemical Compounds

Engineering & Materials Science