MEMS tactile display: From fabrication to characterization

Norihisa Miki, Yumi Kosemura, Junpei Watanabe, Hiroaki Ishikawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We report fabrication and characterization of MEMS-based tactile display that can display users various tactile information, such as Braille codes and surface textures. The display consists of 9 micro-actuators that are equipped with hydraulic displacement amplification mechanism (HDAM) to achieve large enough displacement to stimulate the human tactile receptors. HDAM encapsulates incompressible liquids. We developed a liquid encapsulation process, which we termed as Bonding-in-Liquid Technique, where bonding with a UV-curable resin in glycerin is conducted in the liquid, which prevented interfusion of air bubbles and deformation of the membrane during the bonding. HDAM successfully amplified the displacement generated by piezoelectric actuators by a factor of 6. The display could virtually produce “rough†and “smooth†surfaces, by controlling the vibration frequency, displacement, and the actuation periods of an actuator until the adjacent actuator was driven. We introduced a sample comparison method to characterize the surfaces, which involves human tactile sensation. First, we prepared samples whose mechanical properties are known. We displayed a surface texture to the user by controlling the parameters and then, the user selects a sample that has the most similar surface texture. By doing so, we can correlate the parameters with the mechanical properties of the sample as well as find the sets of the parameters that can provide similar tactile information to many users. The preliminary results with respect to roughness and hardness is presented.

Original languageEnglish
Title of host publicationReliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII
PublisherSPIE
ISBN (Print)9780819498885
DOIs
Publication statusPublished - 2014 Jan 1
EventReliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII - San Francisco, CA, United States
Duration: 2014 Feb 32014 Feb 4

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8975
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherReliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII
CountryUnited States
CitySan Francisco, CA
Period14/2/314/2/4

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Keywords

  • Hydraulic amplification
  • Liquid encapsulation
  • Microelectromechanical systems
  • Sample comparison method
  • Surface textures
  • Tactile display
  • User involved characterization

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Miki, N., Kosemura, Y., Watanabe, J., & Ishikawa, H. (2014). MEMS tactile display: From fabrication to characterization. In Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS, Nanodevices, and Nanomaterials XIII [897506] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 8975). SPIE. https://doi.org/10.1117/12.2044127