Mems tactile display with hydraulic displacement amplification mechanism

T. Ninomiya, K. Osawa, Y. Okayama, Yoshinori Matsumoto, Norihisa Miki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

14 Citations (Scopus)

Abstract

Tactile displays mechanically stimulate tactile receptors on a finger pad. They require a micro-actuator array capable of generating displacement greater than 100 gim. We propose a MEMS-based tactile display with hydraulic displacement amplification mechanisms (HDAM). HDAM contains micro-cavities that have different cross-sectional areas between at the contact and the drive parts and encapsulate incompressive glycerin with largely-deformable thin PDMS (polydimethylsiloxane) membranes. Displacement applied to the drive part is amplified at the contact part associated with the ratio of cross-sectional areas of the drive to the contact parts. HDAM was fabricated and achieved a seven-fold of amplification. We successfully demonstrated rewritable Braille codes.

Original languageEnglish
Title of host publicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages467-470
Number of pages4
DOIs
Publication statusPublished - 2009
Event22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy
Duration: 2009 Jan 252009 Jan 29

Other

Other22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009
CountryItaly
CitySorrento
Period09/1/2509/1/29

Fingerprint

hydraulics
Amplification
Display devices
Hydraulics
braille
Polydimethylsiloxane
Glycerol
Contacts (fluid mechanics)
MEMS
Actuators
microelectromechanical systems
Membranes
actuators
membranes
cavities

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Condensed Matter Physics
  • Electronic, Optical and Magnetic Materials

Cite this

Ninomiya, T., Osawa, K., Okayama, Y., Matsumoto, Y., & Miki, N. (2009). Mems tactile display with hydraulic displacement amplification mechanism. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 467-470). [4805420] https://doi.org/10.1109/MEMSYS.2009.4805420

Mems tactile display with hydraulic displacement amplification mechanism. / Ninomiya, T.; Osawa, K.; Okayama, Y.; Matsumoto, Yoshinori; Miki, Norihisa.

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2009. p. 467-470 4805420.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ninomiya, T, Osawa, K, Okayama, Y, Matsumoto, Y & Miki, N 2009, Mems tactile display with hydraulic displacement amplification mechanism. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., 4805420, pp. 467-470, 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009, Sorrento, Italy, 09/1/25. https://doi.org/10.1109/MEMSYS.2009.4805420
Ninomiya T, Osawa K, Okayama Y, Matsumoto Y, Miki N. Mems tactile display with hydraulic displacement amplification mechanism. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2009. p. 467-470. 4805420 https://doi.org/10.1109/MEMSYS.2009.4805420
Ninomiya, T. ; Osawa, K. ; Okayama, Y. ; Matsumoto, Yoshinori ; Miki, Norihisa. / Mems tactile display with hydraulic displacement amplification mechanism. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2009. pp. 467-470
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