Mems tactile display with hydraulic displacement amplification mechanism

T. Ninomiya, K. Osawa, Y. Okayama, Y. Matsumoto, N. Miki

Research output: Contribution to journalConference article

16 Citations (Scopus)

Abstract

Tactile displays mechanically stimulate tactile receptors on a finger pad. They require a micro-actuator array capable of generating displacement greater than 100 gim. We propose a MEMS-based tactile display with hydraulic displacement amplification mechanisms (HDAM). HDAM contains micro-cavities that have different cross-sectional areas between at the contact and the drive parts and encapsulate incompressive glycerin with largely-deformable thin PDMS (polydimethylsiloxane) membranes. Displacement applied to the drive part is amplified at the contact part associated with the ratio of cross-sectional areas of the drive to the contact parts. HDAM was fabricated and achieved a seven-fold of amplification. We successfully demonstrated rewritable Braille codes.

Original languageEnglish
Article number4805420
Pages (from-to)467-470
Number of pages4
JournalProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs
Publication statusPublished - 2009 Jun 1
Event22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy
Duration: 2009 Jan 252009 Jan 29

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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