MEMS triaxial gyroscope using surface and sidewall doping piezoresistors

Hidetoshi Takahashi, Kohsuke Abe, Tomoyuki Takahata, Isao Shimoyama

Research output: Contribution to journalArticlepeer-review

Abstract

This paper describes a MEMS triaxial gyroscope utilizing three-dimensional piezoresistive elements. MEMS gyroscopes are widely used for robot motion control, drones, mobile phones and so on. Although a piezoresistive sensing element has the potential for high sensitivity to angular velocity via vibrations that occur due to the Coriolis force, a commonly used piezoresistor, which is formed on a device surface, is not suitable to measure in-plane deformations. Thus, it is difficult to realize a sensing element for a triaxial gyroscope with conventional piezoresistors, especially an element for the detection of vertical axis angular velocity. Here, we propose a triaxial gyroscope utilizing surface and sidewall doping piezoresistors as the sensing element. The surface and sidewall doping piezoresistors detect out-of-plane and in-plane vibrations due to the corresponding three-dimensional Coriolis forces, respectively. As a result, the triaxial angular velocity becomes measurable. The experimental results show that the fabricated gyroscope responds to three-dimensional angular velocities with low crosstalk. Therefore, the proposed gyroscope is suitable for practical angular velocity measurement applications.

Original languageEnglish
Article number105012
JournalJournal of Micromechanics and Microengineering
Volume30
Issue number10
DOIs
Publication statusPublished - 2020 Oct

Keywords

  • gyroscope
  • piezoresistor
  • sidewall doping
  • triaxial

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint Dive into the research topics of 'MEMS triaxial gyroscope using surface and sidewall doping piezoresistors'. Together they form a unique fingerprint.

Cite this