Metastable Ti1-xAlxN films with different Al content

A. Kimura, H. Hasegawa, K. Yamada, T. Suzuki

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Abstract

The maximum solubility of Al in the Bl-NaCl structure of Ti1-xAlxN films synthesized by the arc ion plating (AIP) method was studied by the X-ray diffraction method using nine kinds of Ti1-xAlx alloy targets with different Al content. Further, the drastic microstructural changes around critical range of Al content were observed by scanning electron microscopy. The resulting data was analyzed.

Original languageEnglish
Pages (from-to)601-602
Number of pages2
JournalJournal of Materials Science Letters
Volume19
Issue number7
DOIs
Publication statusPublished - 2000 Jan 1

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ASJC Scopus subject areas

  • Materials Science(all)

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