TY - JOUR
T1 - Metastable Ti1-xAlxN films with different Al content
AU - Kimura, A.
AU - Hasegawa, H.
AU - Yamada, K.
AU - Suzuki, T.
N1 - Funding Information:
This work has been supported by the Mitsubishi Scholarship Foundation.
Copyright:
Copyright 2004 Elsevier Science B.V., Amsterdam. All rights reserved.
PY - 2000
Y1 - 2000
N2 - The maximum solubility of Al in the Bl-NaCl structure of Ti1-xAlxN films synthesized by the arc ion plating (AIP) method was studied by the X-ray diffraction method using nine kinds of Ti1-xAlx alloy targets with different Al content. Further, the drastic microstructural changes around critical range of Al content were observed by scanning electron microscopy. The resulting data was analyzed.
AB - The maximum solubility of Al in the Bl-NaCl structure of Ti1-xAlxN films synthesized by the arc ion plating (AIP) method was studied by the X-ray diffraction method using nine kinds of Ti1-xAlx alloy targets with different Al content. Further, the drastic microstructural changes around critical range of Al content were observed by scanning electron microscopy. The resulting data was analyzed.
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U2 - 10.1023/A:1006738514096
DO - 10.1023/A:1006738514096
M3 - Article
AN - SCOPUS:0033906623
SN - 0261-8028
VL - 19
SP - 601
EP - 602
JO - Journal of Materials Science Letters
JF - Journal of Materials Science Letters
IS - 7
ER -