Metastable Ti1-xAlxN films with different Al content

A. Kimura, H. Hasegawa, K. Yamada, T. Suzuki

Research output: Contribution to journalArticlepeer-review

35 Citations (Scopus)

Fingerprint Dive into the research topics of 'Metastable Ti<sub>1-x</sub>Al<sub>x</sub>N films with different Al content'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds