Micro grooving on single-crystal germanium for infrared Fresnel lenses

Jiwang Yan, Kouki Maekawa, Jun'ichi Tamaki, Tsunemoto Kuriyagawa

Research output: Contribution to journalArticle

80 Citations (Scopus)

Abstract

Single-crystal germanium is an excellent optical material in the infrared wavelength range. The development of germanium Fresnel lenses not only improves the optical imaging quality but also enables the miniaturization of optical systems. In the present work, we developed a ductile-mode micro grooving process for fabricating Fresnel lenses on germanium. We used a sharply pointed diamond tool to generate the micro Fresnel structures under three-axis ultraprecision numerical control. By adopting a small angle between the cutting edge and the tangent of the objective surface, this method enables the uniform thinning of the undeformed chip thickness to the nanometric range, and thus provides complete ductile regime machining of brittle materials. Under the present conditions, a Fresnel lens which has a form error of 0.5 νm and surface roughness of 20-50 nm Ry (peak-to-valley) was fabricated successfully during a single tool pass.

Original languageEnglish
Pages (from-to)1925-1931
Number of pages7
JournalJournal of Micromechanics and Microengineering
Volume15
Issue number10
DOIs
Publication statusPublished - 2005 Oct 1
Externally publishedYes

Fingerprint

grooving
Germanium
Fresnel lenses
Lenses
germanium
Single crystals
Infrared radiation
single crystals
numerical control
brittle materials
Diamond
Optical materials
miniaturization
optical materials
Brittleness
tangents
machining
Optical systems
valleys
Diamonds

ASJC Scopus subject areas

  • Instrumentation
  • Materials Science(all)
  • Mechanics of Materials
  • Computational Mechanics

Cite this

Micro grooving on single-crystal germanium for infrared Fresnel lenses. / Yan, Jiwang; Maekawa, Kouki; Tamaki, Jun'ichi; Kuriyagawa, Tsunemoto.

In: Journal of Micromechanics and Microengineering, Vol. 15, No. 10, 01.10.2005, p. 1925-1931.

Research output: Contribution to journalArticle

Yan, Jiwang ; Maekawa, Kouki ; Tamaki, Jun'ichi ; Kuriyagawa, Tsunemoto. / Micro grooving on single-crystal germanium for infrared Fresnel lenses. In: Journal of Micromechanics and Microengineering. 2005 ; Vol. 15, No. 10. pp. 1925-1931.
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