Micro water flow measurement using a temperature-Compensated MEMS piezoresistive cantilever

Romain Pommois; Gaku Furusawa; Takuya Kosuge; Shun Yasunaga; Haruki Hanawa; Hidetoshi Takahashi; Tetsuo Kan; Hisayuki Aoyama

doi:10.3390/mi11070647

Micro water flow measurement using a temperature-Compensated MEMS piezoresistive cantilever

Romain Pommois, Gaku Furusawa, Takuya Kosuge, Shun Yasunaga, Haruki Hanawa, Hidetoshi Takahashi, Tetsuo Kan, Hisayuki Aoyama

Department of Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

In this study, we propose a microelectromechanical system (MEMS) force sensor for microflow measurements. The sensor is equipped with a flow sensing piezoresistive cantilever and a dummy piezoresistive cantilever, which acts as a temperature reference. Since the dummy cantilever is also in the form of a thin cantilever, the temperature environment of the dummy sensor is almost identical to that of the sensing cantilever. The temperature compensation effect was measured, and the piezoresistive cantilever was combined with a gasket jig to enable the direct implementation of the piezoresistive cantilever in a flow tube. The sensor device stably measured flow rates from 20 μL/s to 400 μL/s in a silicon tube with a 2-mm inner diameter without being disturbed by temperature fluctuations.

Original language	English
Article number	647
Journal	Micromachines
Volume	11
Issue number	7
DOIs	https://doi.org/10.3390/mi11070647
Publication status	Published - 2020 Jul

Keywords

Microelectromechanical system (MEMS) cantilever-type force sensor
Microflow measurement
Temperature compensation

ASJC Scopus subject areas

Control and Systems Engineering
Mechanical Engineering
Electrical and Electronic Engineering

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10.3390/mi11070647

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title = "Micro water flow measurement using a temperature-Compensated MEMS piezoresistive cantilever",

abstract = "In this study, we propose a microelectromechanical system (MEMS) force sensor for microflow measurements. The sensor is equipped with a flow sensing piezoresistive cantilever and a dummy piezoresistive cantilever, which acts as a temperature reference. Since the dummy cantilever is also in the form of a thin cantilever, the temperature environment of the dummy sensor is almost identical to that of the sensing cantilever. The temperature compensation effect was measured, and the piezoresistive cantilever was combined with a gasket jig to enable the direct implementation of the piezoresistive cantilever in a flow tube. The sensor device stably measured flow rates from 20 μL/s to 400 μL/s in a silicon tube with a 2-mm inner diameter without being disturbed by temperature fluctuations.",

keywords = "Microelectromechanical system (MEMS) cantilever-type force sensor, Microflow measurement, Temperature compensation",

author = "Romain Pommois and Gaku Furusawa and Takuya Kosuge and Shun Yasunaga and Haruki Hanawa and Hidetoshi Takahashi and Tetsuo Kan and Hisayuki Aoyama",

note = "Funding Information: This research received no external funding. The microfabrications were partly performed in a clean room of the Division of Advanced Research Facilities (Darf) of the Coordinated Center for UEC Research Facilities of the University of Electro-Communications, Tokyo, Japan. Publisher Copyright: {\textcopyright} 2020 by the authors.",

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doi = "10.3390/mi11070647",

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AU - Pommois, Romain

AU - Furusawa, Gaku

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AU - Yasunaga, Shun

AU - Hanawa, Haruki

AU - Takahashi, Hidetoshi

AU - Kan, Tetsuo

AU - Aoyama, Hisayuki

N1 - Funding Information: This research received no external funding. The microfabrications were partly performed in a clean room of the Division of Advanced Research Facilities (Darf) of the Coordinated Center for UEC Research Facilities of the University of Electro-Communications, Tokyo, Japan. Publisher Copyright: © 2020 by the authors.

PY - 2020/7

Y1 - 2020/7

N2 - In this study, we propose a microelectromechanical system (MEMS) force sensor for microflow measurements. The sensor is equipped with a flow sensing piezoresistive cantilever and a dummy piezoresistive cantilever, which acts as a temperature reference. Since the dummy cantilever is also in the form of a thin cantilever, the temperature environment of the dummy sensor is almost identical to that of the sensing cantilever. The temperature compensation effect was measured, and the piezoresistive cantilever was combined with a gasket jig to enable the direct implementation of the piezoresistive cantilever in a flow tube. The sensor device stably measured flow rates from 20 μL/s to 400 μL/s in a silicon tube with a 2-mm inner diameter without being disturbed by temperature fluctuations.

AB - In this study, we propose a microelectromechanical system (MEMS) force sensor for microflow measurements. The sensor is equipped with a flow sensing piezoresistive cantilever and a dummy piezoresistive cantilever, which acts as a temperature reference. Since the dummy cantilever is also in the form of a thin cantilever, the temperature environment of the dummy sensor is almost identical to that of the sensing cantilever. The temperature compensation effect was measured, and the piezoresistive cantilever was combined with a gasket jig to enable the direct implementation of the piezoresistive cantilever in a flow tube. The sensor device stably measured flow rates from 20 μL/s to 400 μL/s in a silicon tube with a 2-mm inner diameter without being disturbed by temperature fluctuations.

KW - Microelectromechanical system (MEMS) cantilever-type force sensor

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Micro water flow measurement using a temperature-Compensated MEMS piezoresistive cantilever

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Keywords

ASJC Scopus subject areas

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