Micro water flow measurement using a temperature-Compensated MEMS piezoresistive cantilever

Romain Pommois, Gaku Furusawa, Takuya Kosuge, Shun Yasunaga, Haruki Hanawa, Hidetoshi Takahashi, Tetsuo Kan, Hisayuki Aoyama

Research output: Contribution to journalArticlepeer-review

Abstract

In this study, we propose a microelectromechanical system (MEMS) force sensor for microflow measurements. The sensor is equipped with a flow sensing piezoresistive cantilever and a dummy piezoresistive cantilever, which acts as a temperature reference. Since the dummy cantilever is also in the form of a thin cantilever, the temperature environment of the dummy sensor is almost identical to that of the sensing cantilever. The temperature compensation effect was measured, and the piezoresistive cantilever was combined with a gasket jig to enable the direct implementation of the piezoresistive cantilever in a flow tube. The sensor device stably measured flow rates from 20 μL/s to 400 μL/s in a silicon tube with a 2-mm inner diameter without being disturbed by temperature fluctuations.

Original languageEnglish
Article number647
JournalMicromachines
Volume11
Issue number7
DOIs
Publication statusPublished - 2020 Jul

Keywords

  • Microelectromechanical system (MEMS) cantilever-type force sensor
  • Microflow measurement
  • Temperature compensation

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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