Micromilling characteristics and electrochemically assisted reconditioning of polycrystalline diamond tool surfaces for ultra-precision machining of high-purity SiC

Kazutoshi Katahira, Shogo Takesue, Jun Komotori, Kazuo Yamazaki

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

The production of extremely thick silicon carbide (SiC) has recently become possible with the advent of a specific chemical vapor deposition process. Ultra-precision machining of high-purity SiC has been performed by using a polycrystalline diamond (PCD) micromilling tool to investigate the machining characteristics. Results indicate that a high-quality surface (Ra = 1.7 nm) can be obtained when the removed chips are thin enough to achieve ductile mode machining. Micron-sized wells and groove structures with nanometer-scale surface roughness were successfully machined by using the PCD tool. In addition, a new electrochemically assisted surface reconditioning process has been proposed to remove the contaminant material adhered onto the PCD tool surfaces after prolonged machining.

Original languageEnglish
Pages (from-to)329-332
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Volume63
Issue number1
DOIs
Publication statusPublished - 2014

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Keywords

  • Micromachining
  • Polycrystalline diamond (PCD) tool
  • Silicon carbide

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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