Microscale patterning of single crystal diamond using sidero-metal/diamond thermochemical reaction

Yuko Morofushi, Hajime Matsushita, Norihisa Miki

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Single crystal diamond is expected to be a new material for not only micro machining tools but also innovative micro devices. In this paper, we demonstrate the micro-patterning of bulk diamond by exploiting thermochemical reaction between diamond and sidero-metals. We demonstrate micro-patterning of single crystal diamond by annealing at ∼1073 K after either micro-patterning nickel on the diamond or placing the diamond on a silicon substrate with a micro-patterned nickel layer. Etching rates ∼0.2μm/min were successfully achieved. We also experimentally elucidated the etching mechanisms and identified the dominant factors in the etching processes.

Original languageEnglish
Title of host publicationMicroelectromechanical Systems - Materials and Devices III
Number of pages6
Publication statusPublished - 2010 Aug 30
Event2009 MRS Fall Meeting - Boston, MA, United States
Duration: 2009 Nov 302009 Dec 4

Publication series

NameMaterials Research Society Symposium Proceedings
ISSN (Print)0272-9172


Other2009 MRS Fall Meeting
Country/TerritoryUnited States
CityBoston, MA

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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