Microscale patterning of single crystal diamond using sidero-metal/diamond thermochemical reaction

Yuko Morofushi, Hajime Matsushita, Norihisa Miki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Single crystal diamond is expected to be a new material for not only micro machining tools but also innovative micro devices. In this paper, we demonstrate the micro-patterning of bulk diamond by exploiting thermochemical reaction between diamond and sidero-metals. We demonstrate micro-patterning of single crystal diamond by annealing at ∼1073 K after either micro-patterning nickel on the diamond or placing the diamond on a silicon substrate with a micro-patterned nickel layer. Etching rates ∼0.2μm/min were successfully achieved. We also experimentally elucidated the etching mechanisms and identified the dominant factors in the etching processes.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium Proceedings
Pages179-184
Number of pages6
Volume1222
Publication statusPublished - 2010
Event2009 MRS Fall Meeting - Boston, MA, United States
Duration: 2009 Nov 302009 Dec 2

Other

Other2009 MRS Fall Meeting
CountryUnited States
CityBoston, MA
Period09/11/3009/12/2

Fingerprint

Diamond
microbalances
Diamonds
Metals
diamonds
Single crystals
single crystals
metals
Etching
etching
Nickel
nickel
Silicon
machining
Machining
Annealing
annealing
silicon
Substrates

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Morofushi, Y., Matsushita, H., & Miki, N. (2010). Microscale patterning of single crystal diamond using sidero-metal/diamond thermochemical reaction. In Materials Research Society Symposium Proceedings (Vol. 1222, pp. 179-184)

Microscale patterning of single crystal diamond using sidero-metal/diamond thermochemical reaction. / Morofushi, Yuko; Matsushita, Hajime; Miki, Norihisa.

Materials Research Society Symposium Proceedings. Vol. 1222 2010. p. 179-184.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Morofushi, Y, Matsushita, H & Miki, N 2010, Microscale patterning of single crystal diamond using sidero-metal/diamond thermochemical reaction. in Materials Research Society Symposium Proceedings. vol. 1222, pp. 179-184, 2009 MRS Fall Meeting, Boston, MA, United States, 09/11/30.
Morofushi Y, Matsushita H, Miki N. Microscale patterning of single crystal diamond using sidero-metal/diamond thermochemical reaction. In Materials Research Society Symposium Proceedings. Vol. 1222. 2010. p. 179-184
Morofushi, Yuko ; Matsushita, Hajime ; Miki, Norihisa. / Microscale patterning of single crystal diamond using sidero-metal/diamond thermochemical reaction. Materials Research Society Symposium Proceedings. Vol. 1222 2010. pp. 179-184
@inproceedings{19f55960535a4389a8dfbb50852b1990,
title = "Microscale patterning of single crystal diamond using sidero-metal/diamond thermochemical reaction",
abstract = "Single crystal diamond is expected to be a new material for not only micro machining tools but also innovative micro devices. In this paper, we demonstrate the micro-patterning of bulk diamond by exploiting thermochemical reaction between diamond and sidero-metals. We demonstrate micro-patterning of single crystal diamond by annealing at ∼1073 K after either micro-patterning nickel on the diamond or placing the diamond on a silicon substrate with a micro-patterned nickel layer. Etching rates ∼0.2μm/min were successfully achieved. We also experimentally elucidated the etching mechanisms and identified the dominant factors in the etching processes.",
author = "Yuko Morofushi and Hajime Matsushita and Norihisa Miki",
year = "2010",
language = "English",
isbn = "9781605111957",
volume = "1222",
pages = "179--184",
booktitle = "Materials Research Society Symposium Proceedings",

}

TY - GEN

T1 - Microscale patterning of single crystal diamond using sidero-metal/diamond thermochemical reaction

AU - Morofushi, Yuko

AU - Matsushita, Hajime

AU - Miki, Norihisa

PY - 2010

Y1 - 2010

N2 - Single crystal diamond is expected to be a new material for not only micro machining tools but also innovative micro devices. In this paper, we demonstrate the micro-patterning of bulk diamond by exploiting thermochemical reaction between diamond and sidero-metals. We demonstrate micro-patterning of single crystal diamond by annealing at ∼1073 K after either micro-patterning nickel on the diamond or placing the diamond on a silicon substrate with a micro-patterned nickel layer. Etching rates ∼0.2μm/min were successfully achieved. We also experimentally elucidated the etching mechanisms and identified the dominant factors in the etching processes.

AB - Single crystal diamond is expected to be a new material for not only micro machining tools but also innovative micro devices. In this paper, we demonstrate the micro-patterning of bulk diamond by exploiting thermochemical reaction between diamond and sidero-metals. We demonstrate micro-patterning of single crystal diamond by annealing at ∼1073 K after either micro-patterning nickel on the diamond or placing the diamond on a silicon substrate with a micro-patterned nickel layer. Etching rates ∼0.2μm/min were successfully achieved. We also experimentally elucidated the etching mechanisms and identified the dominant factors in the etching processes.

UR - http://www.scopus.com/inward/record.url?scp=77955968447&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77955968447&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:77955968447

SN - 9781605111957

VL - 1222

SP - 179

EP - 184

BT - Materials Research Society Symposium Proceedings

ER -