Microstructure of diamond-like carbon films prepared by cathodic arc deposition

Ayako Kimura, Yasushi Azuma, Tetsuya Suzuki, Tomohiro Saito, Yuichi Ikuhara

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Diamond-like carbon films were synthesized under vacuum, argon, methane and hydrogen circumstance by cathodic arc deposition from graphite cathodes. Electron diffraction patterns and high resolution micrographs indicated that graphite crystal cathodes were decomposed under plasma circumstance and amorphous carbon films were formed in all the cases of film deposition. The sp3/sp2 ratio was measured by energy loss electron spectroscopy and X-ray photoelectron spectroscopy. The films, synthesized under hydrogen plasma, had the largest sp3/sp2 ratio, compared with those under vacuum, argon and methane circumstances.

Original languageEnglish
Pages (from-to)1436-1440
Number of pages5
JournalDiamond and Related Materials
Volume11
Issue number7
DOIs
Publication statusPublished - 2002 Jul 1

Keywords

  • Amorphous carbon
  • Chemical bonding
  • Microstructure
  • Physical vapor deposition

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Chemistry(all)
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering

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