Microstructures of (Ti,Cr,Al,Si)N films synthesized by cathodic arc method

K. Ichijo, H. Hasegawa, Tetsuya Suzuki

Research output: Contribution to journalArticle

26 Citations (Scopus)

Abstract

(Ti,Cr,Al,Si)N films were deposited on WC and Si substrate by cathodic arc method with TiCrAlSi alloy cathodes. At lower (Al + Si) contents from 0.56 to 0.60, the crystal structure of (Ti,Cr,Al,Si)N had NaCl type cubic structure. With increasing (Al + Si) contents, the NaCl structure changed to a hexagonal structure. The maximum hardness of (Ti,Cr,Al,Si)N was 31 GPa at 0.56 of (Si + Al) contents. Corresponding with structural changes from NaCl to wurtzite, microhardness decreased down to 26 GPa. TEM photographs indicated that embedding Si atom was effective to decreased grain sizes of 5-10 nm. In this paper, relationships between microstructure and microhardness as a function of Si and Al contents are discussed based on the phase transformation, analyzed by X-ray diffraction method and transmission electron microscopy.

Original languageEnglish
Pages (from-to)5477-5480
Number of pages4
JournalSurface and Coatings Technology
Volume201
Issue number9-11 SPEC. ISS.
DOIs
Publication statusPublished - 2007 Feb 26

Fingerprint

Microhardness
arcs
Transmission electron microscopy
microstructure
Microstructure
microhardness
Cathodes
Crystal structure
Phase transitions
Hardness
X ray diffraction
Atoms
transmission electron microscopy
Substrates
photographs
wurtzite
embedding
phase transformations
hardness
grain size

Keywords

  • (Ti,Cr,Al,Si)N
  • Microhardness
  • Microstructure

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

Cite this

Microstructures of (Ti,Cr,Al,Si)N films synthesized by cathodic arc method. / Ichijo, K.; Hasegawa, H.; Suzuki, Tetsuya.

In: Surface and Coatings Technology, Vol. 201, No. 9-11 SPEC. ISS., 26.02.2007, p. 5477-5480.

Research output: Contribution to journalArticle

Ichijo, K. ; Hasegawa, H. ; Suzuki, Tetsuya. / Microstructures of (Ti,Cr,Al,Si)N films synthesized by cathodic arc method. In: Surface and Coatings Technology. 2007 ; Vol. 201, No. 9-11 SPEC. ISS. pp. 5477-5480.
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