TY - JOUR
T1 - Microstructures of (Ti,Cr,Al,Si)N films synthesized by cathodic arc method
AU - Ichijo, K.
AU - Hasegawa, H.
AU - Suzuki, T.
N1 - Funding Information:
This work was supported by Grant-in-Aid for the 21st Century COE program “KEIO Life-Conjugated Chemistry” and Japan Society for the Promotion of Science from the Ministry of Education, Culture, Sports, Science, and Technology, Japan.
PY - 2007/2/26
Y1 - 2007/2/26
N2 - (Ti,Cr,Al,Si)N films were deposited on WC and Si substrate by cathodic arc method with TiCrAlSi alloy cathodes. At lower (Al + Si) contents from 0.56 to 0.60, the crystal structure of (Ti,Cr,Al,Si)N had NaCl type cubic structure. With increasing (Al + Si) contents, the NaCl structure changed to a hexagonal structure. The maximum hardness of (Ti,Cr,Al,Si)N was 31 GPa at 0.56 of (Si + Al) contents. Corresponding with structural changes from NaCl to wurtzite, microhardness decreased down to 26 GPa. TEM photographs indicated that embedding Si atom was effective to decreased grain sizes of 5-10 nm. In this paper, relationships between microstructure and microhardness as a function of Si and Al contents are discussed based on the phase transformation, analyzed by X-ray diffraction method and transmission electron microscopy.
AB - (Ti,Cr,Al,Si)N films were deposited on WC and Si substrate by cathodic arc method with TiCrAlSi alloy cathodes. At lower (Al + Si) contents from 0.56 to 0.60, the crystal structure of (Ti,Cr,Al,Si)N had NaCl type cubic structure. With increasing (Al + Si) contents, the NaCl structure changed to a hexagonal structure. The maximum hardness of (Ti,Cr,Al,Si)N was 31 GPa at 0.56 of (Si + Al) contents. Corresponding with structural changes from NaCl to wurtzite, microhardness decreased down to 26 GPa. TEM photographs indicated that embedding Si atom was effective to decreased grain sizes of 5-10 nm. In this paper, relationships between microstructure and microhardness as a function of Si and Al contents are discussed based on the phase transformation, analyzed by X-ray diffraction method and transmission electron microscopy.
KW - (Ti,Cr,Al,Si)N
KW - Microhardness
KW - Microstructure
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U2 - 10.1016/j.surfcoat.2006.07.016
DO - 10.1016/j.surfcoat.2006.07.016
M3 - Article
AN - SCOPUS:33846514590
VL - 201
SP - 5477
EP - 5480
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
IS - 9-11 SPEC. ISS.
ER -