Miniaturization of a grating-based SPR type near-infrared spectrometer by using vibration of a MEMS cantilever

Masaaki Oshita, Hidetoshi Takahashi, Tetsuo Kan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports on a miniaturization method of near-infrared spectrometer based on a plasmonic near-infrared photodetector. The spectrometer has an n-typed Si cantilever with an Au diffraction grating for Surface Plasmon Resonance (SPR) generation. Mechanical vibration of the cantilever provides alternation of the angle of incidence of the light to be measured. Coupled to SPR, the light energy is transduced to photocurrent. Since the different incident angle corresponds to different SPR resonant wavelength, the electrical measurement data of photocurrent during the cantilever vibration provides the whole spectrum information of the incident light. In this time, we developed a spectrometer device and measured time varying series of photocurrent during the cantilever vibration. Waveforms of the series were clearly dependent on the incident wavelength, and coherent to the SPR theory.

Original languageEnglish
Title of host publication2018 IEEE Micro Electro Mechanical Systems, MEMS 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages688-691
Number of pages4
ISBN (Electronic)9781538647820
DOIs
Publication statusPublished - 2018 Apr 24
Externally publishedYes
Event31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 - Belfast, United Kingdom
Duration: 2018 Jan 212018 Jan 25

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2018-January
ISSN (Print)1084-6999

Other

Other31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018
CountryUnited Kingdom
CityBelfast
Period18/1/2118/1/25

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Oshita, M., Takahashi, H., & Kan, T. (2018). Miniaturization of a grating-based SPR type near-infrared spectrometer by using vibration of a MEMS cantilever. In 2018 IEEE Micro Electro Mechanical Systems, MEMS 2018 (pp. 688-691). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2018-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2018.8346648