Modeling of a Gc-sensing element for the interfacial toughness of metal thin films on substrates

Insu Jeon, Masaki Omiya, Kikuo Kishimoto, Tadashi Asahina, Seyoung Im

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

A new type of the sensitive specimen named 'Gc-sensing element' that can be fabricated, using the plain and general micro-fabrication process, is proposed and modeled to measure the interfacial toughness Gc of metal thin films on substrates. For the whole modeling process of the G c-sensing element, the finite element method and the concepts of the linear elastic fracture mechanics are applied. Moreover, the verification for energy-release rates calculated from the linear elastic fracture analysis is carried out, using the elastic-plastic fracture analysis. The results of this research show that the Gc-sensing element provides a simple and convenient method for measuring the precise interfacial toughness of metal thin films on substrates.

Original languageEnglish
Pages (from-to)291-300
Number of pages10
JournalSensors and Actuators, A: Physical
Volume122
Issue number2
DOIs
Publication statusPublished - 2005 Aug 26
Externally publishedYes

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Keywords

  • G-sensing element
  • Indentation
  • Interfacial toughness
  • Metal thin films

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

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