Modeling of a Gc-sensing element for the interfacial toughness of metal thin films on substrates

Insu Jeon; Masaki Omiya; Kikuo Kishimoto; Tadashi Asahina; Seyoung Im

doi:10.1016/j.sna.2005.04.017

Modeling of a G_c-sensing element for the interfacial toughness of metal thin films on substrates

Insu Jeon, Masaki Omiya, Kikuo Kishimoto, Tadashi Asahina, Seyoung Im

Research output: Contribution to journal › Article › peer-review

9 Citations (Scopus)

Abstract

A new type of the sensitive specimen named 'G_c-sensing element' that can be fabricated, using the plain and general micro-fabrication process, is proposed and modeled to measure the interfacial toughness G_c of metal thin films on substrates. For the whole modeling process of the G _c-sensing element, the finite element method and the concepts of the linear elastic fracture mechanics are applied. Moreover, the verification for energy-release rates calculated from the linear elastic fracture analysis is carried out, using the elastic-plastic fracture analysis. The results of this research show that the G_c-sensing element provides a simple and convenient method for measuring the precise interfacial toughness of metal thin films on substrates.

Original language	English
Pages (from-to)	291-300
Number of pages	10
Journal	Sensors and Actuators, A: Physical
Volume	122
Issue number	2
DOIs	https://doi.org/10.1016/j.sna.2005.04.017
Publication status	Published - 2005 Aug 26
Externally published	Yes

Keywords

G-sensing element
Indentation
Interfacial toughness
Metal thin films

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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AU - Omiya, Masaki

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AU - Asahina, Tadashi

AU - Im, Seyoung

PY - 2005/8/26

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