Modeling of a Gc-sensing element for the interfacial toughness of metal thin films on substrates

Insu Jeon; Masaki Omiya; Kikuo Kishimoto; Tadashi Asahina; Seyoung Im

doi:10.1016/j.sna.2005.04.017

Modeling of a G_c-sensing element for the interfacial toughness of metal thin films on substrates

Insu Jeon, Masaki Omiya, Kikuo Kishimoto, Tadashi Asahina, Seyoung Im

Research output: Contribution to journal › Article

9 Citations (Scopus)

Abstract

A new type of the sensitive specimen named 'G_c-sensing element' that can be fabricated, using the plain and general micro-fabrication process, is proposed and modeled to measure the interfacial toughness G_c of metal thin films on substrates. For the whole modeling process of the G _c-sensing element, the finite element method and the concepts of the linear elastic fracture mechanics are applied. Moreover, the verification for energy-release rates calculated from the linear elastic fracture analysis is carried out, using the elastic-plastic fracture analysis. The results of this research show that the G_c-sensing element provides a simple and convenient method for measuring the precise interfacial toughness of metal thin films on substrates.

Original language	English
Pages (from-to)	291-300
Number of pages	10
Journal	Sensors and Actuators, A: Physical
Volume	122
Issue number	2
DOIs	https://doi.org/10.1016/j.sna.2005.04.017
Publication status	Published - 2005 Aug 26
Externally published	Yes

Fingerprint

Keywords

G-sensing element
Indentation
Interfacial toughness
Metal thin films

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

Cite this

Jeon, I., Omiya, M., Kishimoto, K., Asahina, T., & Im, S. (2005). Modeling of a G_c-sensing element for the interfacial toughness of metal thin films on substrates. Sensors and Actuators, A: Physical, 122(2), 291-300. https://doi.org/10.1016/j.sna.2005.04.017

@article{33af01f9435943e7a6f8d2e207bdf6e2,

title = "Modeling of a Gc-sensing element for the interfacial toughness of metal thin films on substrates",

abstract = "A new type of the sensitive specimen named 'Gc-sensing element' that can be fabricated, using the plain and general micro-fabrication process, is proposed and modeled to measure the interfacial toughness Gc of metal thin films on substrates. For the whole modeling process of the G c-sensing element, the finite element method and the concepts of the linear elastic fracture mechanics are applied. Moreover, the verification for energy-release rates calculated from the linear elastic fracture analysis is carried out, using the elastic-plastic fracture analysis. The results of this research show that the Gc-sensing element provides a simple and convenient method for measuring the precise interfacial toughness of metal thin films on substrates.",

keywords = "G-sensing element, Indentation, Interfacial toughness, Metal thin films",

author = "Insu Jeon and Masaki Omiya and Kikuo Kishimoto and Tadashi Asahina and Seyoung Im",

year = "2005",

month = aug,

day = "26",

doi = "10.1016/j.sna.2005.04.017",

language = "English",

volume = "122",

pages = "291--300",

journal = "Sensors and Actuators, A: Physical",

issn = "0924-4247",

publisher = "Elsevier",

number = "2",

}

TY - JOUR

T1 - Modeling of a Gc-sensing element for the interfacial toughness of metal thin films on substrates

AU - Jeon, Insu

AU - Omiya, Masaki

AU - Kishimoto, Kikuo

AU - Asahina, Tadashi

AU - Im, Seyoung

PY - 2005/8/26

Y1 - 2005/8/26

N2 - A new type of the sensitive specimen named 'Gc-sensing element' that can be fabricated, using the plain and general micro-fabrication process, is proposed and modeled to measure the interfacial toughness Gc of metal thin films on substrates. For the whole modeling process of the G c-sensing element, the finite element method and the concepts of the linear elastic fracture mechanics are applied. Moreover, the verification for energy-release rates calculated from the linear elastic fracture analysis is carried out, using the elastic-plastic fracture analysis. The results of this research show that the Gc-sensing element provides a simple and convenient method for measuring the precise interfacial toughness of metal thin films on substrates.

AB - A new type of the sensitive specimen named 'Gc-sensing element' that can be fabricated, using the plain and general micro-fabrication process, is proposed and modeled to measure the interfacial toughness Gc of metal thin films on substrates. For the whole modeling process of the G c-sensing element, the finite element method and the concepts of the linear elastic fracture mechanics are applied. Moreover, the verification for energy-release rates calculated from the linear elastic fracture analysis is carried out, using the elastic-plastic fracture analysis. The results of this research show that the Gc-sensing element provides a simple and convenient method for measuring the precise interfacial toughness of metal thin films on substrates.

KW - G-sensing element

KW - Indentation

KW - Interfacial toughness

KW - Metal thin films

UR - http://www.scopus.com/inward/record.url?scp=23344439139&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=23344439139&partnerID=8YFLogxK

U2 - 10.1016/j.sna.2005.04.017

DO - 10.1016/j.sna.2005.04.017

M3 - Article

AN - SCOPUS:23344439139

VL - 122

SP - 291

EP - 300

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

SN - 0924-4247

IS - 2

ER -

Access to Document

10.1016/j.sna.2005.04.017