Abstract
A new type of the sensitive specimen named 'Gc-sensing element' that can be fabricated, using the plain and general micro-fabrication process, is proposed and modeled to measure the interfacial toughness Gc of metal thin films on substrates. For the whole modeling process of the G c-sensing element, the finite element method and the concepts of the linear elastic fracture mechanics are applied. Moreover, the verification for energy-release rates calculated from the linear elastic fracture analysis is carried out, using the elastic-plastic fracture analysis. The results of this research show that the Gc-sensing element provides a simple and convenient method for measuring the precise interfacial toughness of metal thin films on substrates.
| Original language | English |
|---|---|
| Pages (from-to) | 291-300 |
| Number of pages | 10 |
| Journal | Sensors and Actuators, A: Physical |
| Volume | 122 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 2005 Aug 26 |
| Externally published | Yes |
Keywords
- G-sensing element
- Indentation
- Interfacial toughness
- Metal thin films
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering
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Cite this
Jeon, I., Omiya, M., Kishimoto, K., Asahina, T., & Im, S. (2005). Modeling of a Gc-sensing element for the interfacial toughness of metal thin films on substrates. Sensors and Actuators, A: Physical, 122(2), 291-300. https://doi.org/10.1016/j.sna.2005.04.017