Modeling of a rf glow discharge plasma

Katsuji Okazaki, Toshiaki Makabe, Yukio Yamaguchi

Research output: Contribution to journalArticle

66 Citations (Scopus)

Abstract

A dynamic model for a rf glow discharge plasma in a parallel-plate geometry has been developed by considering the charged particle transport including the collisional relaxation kinetics. The model has been applied to low pressure and low gas temperature Ar discharge plasmas. A second-stage investigation, i.e., the study of the excited species, has been carried out in comparison with experiments. The effect of the frequency of the driving source has been investigated from the viewpoint of the ionization rate required to maintain the discharge in a rf plasma.

Original languageEnglish
Pages (from-to)1742-1744
Number of pages3
JournalApplied Physics Letters
Volume54
Issue number18
DOIs
Publication statusPublished - 1989 Dec 1

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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    Okazaki, K., Makabe, T., & Yamaguchi, Y. (1989). Modeling of a rf glow discharge plasma. Applied Physics Letters, 54(18), 1742-1744. https://doi.org/10.1063/1.101277