Modeling of a rf glow discharge plasma

Katsuji Okazaki; Toshiaki Makabe; Yukio Yamaguchi

doi:10.1063/1.101277

Modeling of a rf glow discharge plasma

Katsuji Okazaki, Toshiaki Makabe, Yukio Yamaguchi

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Abstract

A dynamic model for a rf glow discharge plasma in a parallel-plate geometry has been developed by considering the charged particle transport including the collisional relaxation kinetics. The model has been applied to low pressure and low gas temperature Ar discharge plasmas. A second-stage investigation, i.e., the study of the excited species, has been carried out in comparison with experiments. The effect of the frequency of the driving source has been investigated from the viewpoint of the ionization rate required to maintain the discharge in a rf plasma.

Original language	English
Pages (from-to)	1742-1744
Number of pages	3
Journal	Applied Physics Letters
Volume	54
Issue number	18
DOIs	https://doi.org/10.1063/1.101277
Publication status	Published - 1989

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.101277

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Modeling of a rf glow discharge plasma

Abstract

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