Abstract
A dynamic model for a rf glow discharge plasma in a parallel-plate geometry has been developed by considering the charged particle transport including the collisional relaxation kinetics. The model has been applied to low pressure and low gas temperature Ar discharge plasmas. A second-stage investigation, i.e., the study of the excited species, has been carried out in comparison with experiments. The effect of the frequency of the driving source has been investigated from the viewpoint of the ionization rate required to maintain the discharge in a rf plasma.
| Original language | English |
|---|---|
| Pages (from-to) | 1742-1744 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 54 |
| Issue number | 18 |
| DOIs | |
| Publication status | Published - 1989 |
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ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)
Cite this
Modeling of a rf glow discharge plasma. / Okazaki, Katsuji; Makabe, Toshiaki; Yamaguchi, Yukio.
In: Applied Physics Letters, Vol. 54, No. 18, 1989, p. 1742-1744.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Modeling of a rf glow discharge plasma
AU - Okazaki, Katsuji
AU - Makabe, Toshiaki
AU - Yamaguchi, Yukio
PY - 1989
Y1 - 1989
N2 - A dynamic model for a rf glow discharge plasma in a parallel-plate geometry has been developed by considering the charged particle transport including the collisional relaxation kinetics. The model has been applied to low pressure and low gas temperature Ar discharge plasmas. A second-stage investigation, i.e., the study of the excited species, has been carried out in comparison with experiments. The effect of the frequency of the driving source has been investigated from the viewpoint of the ionization rate required to maintain the discharge in a rf plasma.
AB - A dynamic model for a rf glow discharge plasma in a parallel-plate geometry has been developed by considering the charged particle transport including the collisional relaxation kinetics. The model has been applied to low pressure and low gas temperature Ar discharge plasmas. A second-stage investigation, i.e., the study of the excited species, has been carried out in comparison with experiments. The effect of the frequency of the driving source has been investigated from the viewpoint of the ionization rate required to maintain the discharge in a rf plasma.
UR - http://www.scopus.com/inward/record.url?scp=0000275361&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0000275361&partnerID=8YFLogxK
U2 - 10.1063/1.101277
DO - 10.1063/1.101277
M3 - Article
AN - SCOPUS:0000275361
VL - 54
SP - 1742
EP - 1744
JO - Applied Physics Letters
JF - Applied Physics Letters
SN - 0003-6951
IS - 18
ER -