Modeling of Si self-diffusion in SiO2: Effect of the Si/SiO2 interface including time-dependent diffusivity

Masashi Uematsu, Hiroyuki Kageshima, Yasuo Takahashi, Shigeto Fukatsu, Kohei M. Itoh, Kenji Shiraishi, Ulrich Gösele

Research output: Contribution to journalArticlepeer-review

63 Citations (Scopus)


A model was constructed in which SiO molecules generated at the interface and diffusing into SiO2 enhance Si self-diffusion in SiO2. Based on the model, the diffusion profiles of ion-implanted 30Si in SiO2 were simulated for various temperatures and SiO2 thickness in a unified manner. In addition, the simulation predicted the possibility of time-dependent diffusivity, which indeed was experimentally observed.

Original languageEnglish
Pages (from-to)876-878
Number of pages3
JournalApplied Physics Letters
Issue number6
Publication statusPublished - 2004 Feb 9

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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