Monolithically integrated three axial accelerometer using stress sensitive CMOS differential amplifiers

Hidekuni Takao, Yoshinori Matsumoto, Makoto Ishida

Research output: Contribution to conferencePaper

12 Citations (Scopus)

Abstract

A CMOS integrated three axial accelerometer based on a novel detection approach is presented. Applied acceleration is translated to voltage signal with 'stress sensitive differential amplifier' (SSDA). Outputs of X, Y and Z axis SSDAs are selected by a 3-ch analog multiplexer, and are amplified by a fully differential amplifier. The chopper stabilization technique was applied to them in order to improve the signal to noise ratio of the total system. The 192mV/G of Z axis, and 23mV/G of X and Y axis overall sensitivity were obtained. A time division multiplex technique which makes it possible to detect three components at the same time, can be realized with the accelerometer, if sample and hold circuits and additional signal processing circuits are combined with the accelerometer.

Original languageEnglish
Pages1173-1176
Number of pages4
Publication statusPublished - 1997 Jan 1
Externally publishedYes
EventProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2) - Chicago, IL, USA
Duration: 1997 Jun 161997 Jun 19

Other

OtherProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2)
CityChicago, IL, USA
Period97/6/1697/6/19

ASJC Scopus subject areas

  • Engineering(all)

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    Takao, H., Matsumoto, Y., & Ishida, M. (1997). Monolithically integrated three axial accelerometer using stress sensitive CMOS differential amplifiers. 1173-1176. Paper presented at Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2), Chicago, IL, USA, .