Monolithically integrated three axial accelerometer using stress sensitive CMOS differential amplifiers

Hidekuni Takao, Yoshinori Matsumoto, Makoto Ishida

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Citations (Scopus)

Abstract

A CMOS integrated three axial accelerometer based on a novel detection approach is presented. Applied acceleration is translated to voltage signal with 'stress sensitive differential amplifier' (SSDA). Outputs of X, Y and Z axis SSDAs are selected by a 3-ch analog multiplexer, and are amplified by a fully differential amplifier. The chopper stabilization technique was applied to them in order to improve the signal to noise ratio of the total system. The 192mV/G of Z axis, and 23mV/G of X and Y axis overall sensitivity were obtained. A time division multiplex technique which makes it possible to detect three components at the same time, can be realized with the accelerometer, if sample and hold circuits and additional signal processing circuits are combined with the accelerometer.

Original languageEnglish
Title of host publicationInternational Conference on Solid-State Sensors and Actuators, Proceedings
PublisherIEEE
Pages1173-1176
Number of pages4
Volume2
Publication statusPublished - 1997
Externally publishedYes
EventProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2) - Chicago, IL, USA
Duration: 1997 Jun 161997 Jun 19

Other

OtherProceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2)
CityChicago, IL, USA
Period97/6/1697/6/19

Fingerprint

Differential amplifiers
Accelerometers
Networks (circuits)
Signal to noise ratio
Signal processing
Stabilization
Electric potential

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Takao, H., Matsumoto, Y., & Ishida, M. (1997). Monolithically integrated three axial accelerometer using stress sensitive CMOS differential amplifiers. In International Conference on Solid-State Sensors and Actuators, Proceedings (Vol. 2, pp. 1173-1176). IEEE.

Monolithically integrated three axial accelerometer using stress sensitive CMOS differential amplifiers. / Takao, Hidekuni; Matsumoto, Yoshinori; Ishida, Makoto.

International Conference on Solid-State Sensors and Actuators, Proceedings. Vol. 2 IEEE, 1997. p. 1173-1176.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Takao, H, Matsumoto, Y & Ishida, M 1997, Monolithically integrated three axial accelerometer using stress sensitive CMOS differential amplifiers. in International Conference on Solid-State Sensors and Actuators, Proceedings. vol. 2, IEEE, pp. 1173-1176, Proceedings of the 1997 International Conference on Solid-State Sensors and Actuators. Part 2 (of 2), Chicago, IL, USA, 97/6/16.
Takao H, Matsumoto Y, Ishida M. Monolithically integrated three axial accelerometer using stress sensitive CMOS differential amplifiers. In International Conference on Solid-State Sensors and Actuators, Proceedings. Vol. 2. IEEE. 1997. p. 1173-1176
Takao, Hidekuni ; Matsumoto, Yoshinori ; Ishida, Makoto. / Monolithically integrated three axial accelerometer using stress sensitive CMOS differential amplifiers. International Conference on Solid-State Sensors and Actuators, Proceedings. Vol. 2 IEEE, 1997. pp. 1173-1176
@inproceedings{b5e752a51c3f4269bd8966310b1c811e,
title = "Monolithically integrated three axial accelerometer using stress sensitive CMOS differential amplifiers",
abstract = "A CMOS integrated three axial accelerometer based on a novel detection approach is presented. Applied acceleration is translated to voltage signal with 'stress sensitive differential amplifier' (SSDA). Outputs of X, Y and Z axis SSDAs are selected by a 3-ch analog multiplexer, and are amplified by a fully differential amplifier. The chopper stabilization technique was applied to them in order to improve the signal to noise ratio of the total system. The 192mV/G of Z axis, and 23mV/G of X and Y axis overall sensitivity were obtained. A time division multiplex technique which makes it possible to detect three components at the same time, can be realized with the accelerometer, if sample and hold circuits and additional signal processing circuits are combined with the accelerometer.",
author = "Hidekuni Takao and Yoshinori Matsumoto and Makoto Ishida",
year = "1997",
language = "English",
volume = "2",
pages = "1173--1176",
booktitle = "International Conference on Solid-State Sensors and Actuators, Proceedings",
publisher = "IEEE",

}

TY - GEN

T1 - Monolithically integrated three axial accelerometer using stress sensitive CMOS differential amplifiers

AU - Takao, Hidekuni

AU - Matsumoto, Yoshinori

AU - Ishida, Makoto

PY - 1997

Y1 - 1997

N2 - A CMOS integrated three axial accelerometer based on a novel detection approach is presented. Applied acceleration is translated to voltage signal with 'stress sensitive differential amplifier' (SSDA). Outputs of X, Y and Z axis SSDAs are selected by a 3-ch analog multiplexer, and are amplified by a fully differential amplifier. The chopper stabilization technique was applied to them in order to improve the signal to noise ratio of the total system. The 192mV/G of Z axis, and 23mV/G of X and Y axis overall sensitivity were obtained. A time division multiplex technique which makes it possible to detect three components at the same time, can be realized with the accelerometer, if sample and hold circuits and additional signal processing circuits are combined with the accelerometer.

AB - A CMOS integrated three axial accelerometer based on a novel detection approach is presented. Applied acceleration is translated to voltage signal with 'stress sensitive differential amplifier' (SSDA). Outputs of X, Y and Z axis SSDAs are selected by a 3-ch analog multiplexer, and are amplified by a fully differential amplifier. The chopper stabilization technique was applied to them in order to improve the signal to noise ratio of the total system. The 192mV/G of Z axis, and 23mV/G of X and Y axis overall sensitivity were obtained. A time division multiplex technique which makes it possible to detect three components at the same time, can be realized with the accelerometer, if sample and hold circuits and additional signal processing circuits are combined with the accelerometer.

UR - http://www.scopus.com/inward/record.url?scp=0030654806&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0030654806&partnerID=8YFLogxK

M3 - Conference contribution

VL - 2

SP - 1173

EP - 1176

BT - International Conference on Solid-State Sensors and Actuators, Proceedings

PB - IEEE

ER -