Monosilane Adsorption on Porous Alumina

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4 Citations (Scopus)

Abstract

Adsorption of monosilane on porous adsorbents consisting of γ-alumina, alumina-silica, and silica was investigated. The maximum adsorption capacity was observed for alumina adsorbents with drying in nitrogen at ~ 100°C. Thus, monosilane is deduced to react with hydroxyl groups on γ-alumina surface, although physically adsorbed water interferes with the reaction. On the other hand, hydroxyl groups on silica were inactive for monosilane. The difference in the reactivity of hydroxyl groups with monosilane is ascribed to the basicity of the oxides.

Original languageEnglish
Pages (from-to)3202-3204
Number of pages3
JournalJournal of the Electrochemical Society
Volume142
Issue number9
DOIs
Publication statusPublished - 1995

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films
  • Electrochemistry
  • Materials Chemistry

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