The amorphization of silicon due to atomic displacement during ion implantation has been simulated. A model based on Monte Carlo calculation reproduces very well the depth profile of atomic mixing and displacement length of host silicon atoms reported by previous experiments. The critical displacement in the depth direction for amorphization has been determined to be 5 Å. This average threshold value is shown to be universal for identification of amorphous regions in silicon for a wide range of implantation conditions involving different doping species, acceleration energies, and doses.
ASJC Scopus subject areas
- Physics and Astronomy(all)