Monte Carlo simulation of silicon atomic displacement and amorphization induced by ion implantation

Luis Jou García, Yoko Kawamura, Masashi Uematsu, Jess M. Hernndez-Mangas, Kohei M. Itoh

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Fingerprint Dive into the research topics of 'Monte Carlo simulation of silicon atomic displacement and amorphization induced by ion implantation'. Together they form a unique fingerprint.

Physics & Astronomy