More-than-universal mobility in double-gate SOI p-FETs with sub-10-nm body thickness - Role of light-hole band and compatibility with uniaxial stress engineering

Shigeki Kobayashi, Masumi Saitoh, Ken Uchida

    Research output: Contribution to journalConference articlepeer-review

    14 Citations (Scopus)

    Fingerprint

    Dive into the research topics of 'More-than-universal mobility in double-gate SOI p-FETs with sub-10-nm body thickness - Role of light-hole band and compatibility with uniaxial stress engineering'. Together they form a unique fingerprint.

    Chemical Compounds

    Engineering & Materials Science

    Physics & Astronomy