Multi-Axial Tactile Sensor Using Standing Lig Cantilevers on Polyimide Film

Rihachiro Nakashima; Hidetoshi Takahashi

doi:10.1109/MEMS51670.2022.9699747

Multi-Axial Tactile Sensor Using Standing Lig Cantilevers on Polyimide Film

Rihachiro Nakashima, Hidetoshi Takahashi

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

This paper reports a multi-axial tactile sensor using standing laser-induced graphene (LIG) cantilevers. The fabrication process of the proposed sensor element involves only one irradiating of each of the two types of lasers. Additionally, since the LIG cantilevers are formed on a flexible polyimide (PI) film, the cantilever can be easily kept in a standing position via thermoplastic deformation. As a result, the prototype dual axial sensor realized the measurement of normal and shear stresses with high independence.

Original language	English
Title of host publication	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Publisher	IEEE Computer Society
Pages	688-690
Number of pages	3
ISBN (Electronic)	9781665409117
DOIs	https://doi.org/10.1109/MEMS51670.2022.9699747
Publication status	Published - 2022
Event	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan Duration: 2022 Jan 9 → 2022 Jan 13

Publication series

Name	IEEE Symposium on Mass Storage Systems and Technologies
Volume	2022-January
ISSN (Print)	2160-1968

Conference

Conference	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Country/Territory	Japan
City	Tokyo
Period	22/1/9 → 22/1/13

Keywords

LIG strain gauge
Multi-axial tactile sensor
PDMS
Standing cantilever

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/MEMS51670.2022.9699747

Cite this

Nakashima, R., & Takahashi, H. (2022). Multi-Axial Tactile Sensor Using Standing Lig Cantilevers on Polyimide Film. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 688-690). (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January). IEEE Computer Society. https://doi.org/10.1109/MEMS51670.2022.9699747

Multi-Axial Tactile Sensor Using Standing Lig Cantilevers on Polyimide Film. / Nakashima, Rihachiro; Takahashi, Hidetoshi.
35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. IEEE Computer Society, 2022. p. 688-690 (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Nakashima, R & Takahashi, H 2022, Multi-Axial Tactile Sensor Using Standing Lig Cantilevers on Polyimide Film. in 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. IEEE Symposium on Mass Storage Systems and Technologies, vol. 2022-January, IEEE Computer Society, pp. 688-690, 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, Tokyo, Japan, 22/1/9. https://doi.org/10.1109/MEMS51670.2022.9699747

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title = "Multi-Axial Tactile Sensor Using Standing Lig Cantilevers on Polyimide Film",

abstract = "This paper reports a multi-axial tactile sensor using standing laser-induced graphene (LIG) cantilevers. The fabrication process of the proposed sensor element involves only one irradiating of each of the two types of lasers. Additionally, since the LIG cantilevers are formed on a flexible polyimide (PI) film, the cantilever can be easily kept in a standing position via thermoplastic deformation. As a result, the prototype dual axial sensor realized the measurement of normal and shear stresses with high independence.",

keywords = "LIG strain gauge, Multi-axial tactile sensor, PDMS, Standing cantilever",

author = "Rihachiro Nakashima and Hidetoshi Takahashi",

note = "Funding Information: This work was partially supported by the JSPS KAKENHI under Grant 20H02102. Publisher Copyright: {\textcopyright} 2022 IEEE.; 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",

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doi = "10.1109/MEMS51670.2022.9699747",

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AB - This paper reports a multi-axial tactile sensor using standing laser-induced graphene (LIG) cantilevers. The fabrication process of the proposed sensor element involves only one irradiating of each of the two types of lasers. Additionally, since the LIG cantilevers are formed on a flexible polyimide (PI) film, the cantilever can be easily kept in a standing position via thermoplastic deformation. As a result, the prototype dual axial sensor realized the measurement of normal and shear stresses with high independence.

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Multi-Axial Tactile Sensor Using Standing Lig Cantilevers on Polyimide Film

Abstract

Publication series

Conference

Keywords

ASJC Scopus subject areas

Access to Document

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