Multi-Axial Tactile Sensor Using Standing Lig Cantilevers on Polyimide Film

Rihachiro Nakashima, Hidetoshi Takahashi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports a multi-axial tactile sensor using standing laser-induced graphene (LIG) cantilevers. The fabrication process of the proposed sensor element involves only one irradiating of each of the two types of lasers. Additionally, since the LIG cantilevers are formed on a flexible polyimide (PI) film, the cantilever can be easily kept in a standing position via thermoplastic deformation. As a result, the prototype dual axial sensor realized the measurement of normal and shear stresses with high independence.

Original languageEnglish
Title of host publication35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
PublisherIEEE Computer Society
Pages688-690
Number of pages3
ISBN (Electronic)9781665409117
DOIs
Publication statusPublished - 2022
Event35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan
Duration: 2022 Jan 92022 Jan 13

Publication series

NameIEEE Symposium on Mass Storage Systems and Technologies
Volume2022-January
ISSN (Print)2160-1968

Conference

Conference35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Country/TerritoryJapan
CityTokyo
Period22/1/922/1/13

Keywords

  • LIG strain gauge
  • Multi-axial tactile sensor
  • PDMS
  • Standing cantilever

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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