Abstract
Diamond turning with a slow tool servo (STS) is widely used to generate continuous freeform surfaces, but is difficult to machine discontinuous surfaces having sharp edges, such as microlens array, because of dynamic problems. In this study, we propose a new STS diamond turning method named "segment turning", in which the micro dimples are selectively divided into multiple groups, and each group of dimples are machined in a single turning cycle. In this method, the Z-axis acceleration can be decreased sharply, which reduces dynamic error of the machine tool. As a result, the segment turning method improved the form accuracy greatly compared to conventional turning method within the same machining time. As a test piece, a hexagonal microlens array was successfully fabricated with nanometer level precision.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015 |
| Publisher | euspen |
| Pages | 339-340 |
| Number of pages | 2 |
| ISBN (Print) | 9780956679079 |
| Publication status | Published - 2015 |
| Event | 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015 - Leuven, Belgium Duration: 2015 Jun 1 → 2015 Jun 5 |
Other
| Other | 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015 |
|---|---|
| Country | Belgium |
| City | Leuven |
| Period | 15/6/1 → 15/6/5 |
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Keywords
- Diamond turning
- Microlens array
- Slow tool servo
- Structured surface
- Ultra-precision machining
ASJC Scopus subject areas
- Materials Science(all)
- Industrial and Manufacturing Engineering
- Mechanical Engineering
- Instrumentation
- Environmental Engineering