Abstract
Diamond turning with a slow tool servo (STS) is widely used to generate continuous freeform surfaces, but is difficult to machine discontinuous surfaces having sharp edges, such as microlens array, because of dynamic problems. In this study, we propose a new STS diamond turning method named "segment turning", in which the micro dimples are selectively divided into multiple groups, and each group of dimples are machined in a single turning cycle. In this method, the Z-axis acceleration can be decreased sharply, which reduces dynamic error of the machine tool. As a result, the segment turning method improved the form accuracy greatly compared to conventional turning method within the same machining time. As a test piece, a hexagonal microlens array was successfully fabricated with nanometer level precision.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015 |
| Publisher | euspen |
| Pages | 339-340 |
| Number of pages | 2 |
| ISBN (Print) | 9780956679079 |
| Publication status | Published - 2015 |
| Event | 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015 - Leuven, Belgium Duration: 2015 Jun 1 → 2015 Jun 5 |
Other
| Other | 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015 |
|---|---|
| Country | Belgium |
| City | Leuven |
| Period | 15/6/1 → 15/6/5 |
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Keywords
- Diamond turning
- Microlens array
- Slow tool servo
- Structured surface
- Ultra-precision machining
ASJC Scopus subject areas
- Materials Science(all)
- Industrial and Manufacturing Engineering
- Mechanical Engineering
- Instrumentation
- Environmental Engineering
Cite this
Nano-precision fabrication of hexagonal microlens array by segment turning using slow tool servo. / Mukaida, Mao; Yan, Jiwang.
Proceedings of the 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015. euspen, 2015. p. 339-340.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Nano-precision fabrication of hexagonal microlens array by segment turning using slow tool servo
AU - Mukaida, Mao
AU - Yan, Jiwang
PY - 2015
Y1 - 2015
N2 - Diamond turning with a slow tool servo (STS) is widely used to generate continuous freeform surfaces, but is difficult to machine discontinuous surfaces having sharp edges, such as microlens array, because of dynamic problems. In this study, we propose a new STS diamond turning method named "segment turning", in which the micro dimples are selectively divided into multiple groups, and each group of dimples are machined in a single turning cycle. In this method, the Z-axis acceleration can be decreased sharply, which reduces dynamic error of the machine tool. As a result, the segment turning method improved the form accuracy greatly compared to conventional turning method within the same machining time. As a test piece, a hexagonal microlens array was successfully fabricated with nanometer level precision.
AB - Diamond turning with a slow tool servo (STS) is widely used to generate continuous freeform surfaces, but is difficult to machine discontinuous surfaces having sharp edges, such as microlens array, because of dynamic problems. In this study, we propose a new STS diamond turning method named "segment turning", in which the micro dimples are selectively divided into multiple groups, and each group of dimples are machined in a single turning cycle. In this method, the Z-axis acceleration can be decreased sharply, which reduces dynamic error of the machine tool. As a result, the segment turning method improved the form accuracy greatly compared to conventional turning method within the same machining time. As a test piece, a hexagonal microlens array was successfully fabricated with nanometer level precision.
KW - Diamond turning
KW - Microlens array
KW - Slow tool servo
KW - Structured surface
KW - Ultra-precision machining
UR - http://www.scopus.com/inward/record.url?scp=84936153845&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84936153845&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84936153845
SN - 9780956679079
SP - 339
EP - 340
BT - Proceedings of the 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015
PB - euspen
ER -