Nano-precision fabrication of hexagonal microlens array by segment turning using slow tool servo

Mao Mukaida, Jiwang Yan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Diamond turning with a slow tool servo (STS) is widely used to generate continuous freeform surfaces, but is difficult to machine discontinuous surfaces having sharp edges, such as microlens array, because of dynamic problems. In this study, we propose a new STS diamond turning method named "segment turning", in which the micro dimples are selectively divided into multiple groups, and each group of dimples are machined in a single turning cycle. In this method, the Z-axis acceleration can be decreased sharply, which reduces dynamic error of the machine tool. As a result, the segment turning method improved the form accuracy greatly compared to conventional turning method within the same machining time. As a test piece, a hexagonal microlens array was successfully fabricated with nanometer level precision.

Original languageEnglish
Title of host publicationProceedings of the 15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015
Publishereuspen
Pages339-340
Number of pages2
ISBN (Print)9780956679079
Publication statusPublished - 2015
Event15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015 - Leuven, Belgium
Duration: 2015 Jun 12015 Jun 5

Other

Other15th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2015
CountryBelgium
CityLeuven
Period15/6/115/6/5

Keywords

  • Diamond turning
  • Microlens array
  • Slow tool servo
  • Structured surface
  • Ultra-precision machining

ASJC Scopus subject areas

  • Materials Science(all)
  • Industrial and Manufacturing Engineering
  • Mechanical Engineering
  • Instrumentation
  • Environmental Engineering

Fingerprint Dive into the research topics of 'Nano-precision fabrication of hexagonal microlens array by segment turning using slow tool servo'. Together they form a unique fingerprint.

Cite this