Nanochannel open/close valve utilizing glass deformation on a nanofluidic device

Hiroki Sano, Yutaka Kazoe, Kazuma Mawatari, Takehiko Kitamori

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this study, we implemented a nanochannel open/close valve utilizing glass deformation into a nanofluidic device. Previously, we succeeded in principle verification of the valve fabricated on a thin glass sheet [1], but in this form integration into devices is difficult. Therefore, we fabricated the valve on a glass substrate, which can be used for nanofluidic devices, by making a 30 µm thickness on a small part of the substrate for the valve working. We verified the operation of the fabricated valve and achieved a pressure capacity over 400 kPa, which is sufficient for nanofluidic analytical applications.

Original languageEnglish
Title of host publication22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
PublisherChemical and Biological Microsystems Society
Pages686-687
Number of pages2
ISBN (Electronic)9781510897571
Publication statusPublished - 2018
Event22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018 - Kaohsiung, Taiwan, Province of China
Duration: 2018 Nov 112018 Nov 15

Publication series

Name22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
Volume2

Conference

Conference22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
CountryTaiwan, Province of China
CityKaohsiung
Period18/11/1118/11/15

Keywords

  • Extended-nano space
  • Nanochannel
  • Nanofluidics
  • Valve

ASJC Scopus subject areas

  • Chemistry(all)
  • Bioengineering
  • Chemical Engineering (miscellaneous)
  • Control and Systems Engineering

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  • Cite this

    Sano, H., Kazoe, Y., Mawatari, K., & Kitamori, T. (2018). Nanochannel open/close valve utilizing glass deformation on a nanofluidic device. In 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018 (pp. 686-687). (22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018; Vol. 2). Chemical and Biological Microsystems Society.