TY - GEN
T1 - Nanochannel open/close valve utilizing glass deformation on a nanofluidic device
AU - Sano, Hiroki
AU - Kazoe, Yutaka
AU - Mawatari, Kazuma
AU - Kitamori, Takehiko
N1 - Funding Information:
This work was supported by JST CREST Grant Number JPMJCR14G1, Japan.
PY - 2018
Y1 - 2018
N2 - In this study, we implemented a nanochannel open/close valve utilizing glass deformation into a nanofluidic device. Previously, we succeeded in principle verification of the valve fabricated on a thin glass sheet [1], but in this form integration into devices is difficult. Therefore, we fabricated the valve on a glass substrate, which can be used for nanofluidic devices, by making a 30 µm thickness on a small part of the substrate for the valve working. We verified the operation of the fabricated valve and achieved a pressure capacity over 400 kPa, which is sufficient for nanofluidic analytical applications.
AB - In this study, we implemented a nanochannel open/close valve utilizing glass deformation into a nanofluidic device. Previously, we succeeded in principle verification of the valve fabricated on a thin glass sheet [1], but in this form integration into devices is difficult. Therefore, we fabricated the valve on a glass substrate, which can be used for nanofluidic devices, by making a 30 µm thickness on a small part of the substrate for the valve working. We verified the operation of the fabricated valve and achieved a pressure capacity over 400 kPa, which is sufficient for nanofluidic analytical applications.
KW - Extended-nano space
KW - Nanochannel
KW - Nanofluidics
KW - Valve
UR - http://www.scopus.com/inward/record.url?scp=85079865928&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85079865928&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:85079865928
T3 - 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
SP - 686
EP - 687
BT - 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
PB - Chemical and Biological Microsystems Society
T2 - 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
Y2 - 11 November 2018 through 15 November 2018
ER -