Nanoindentation and diamond turning tests on compound semiconductor InP

Jiwang Yan, Hongwei Zhao, Tsunemoto Kuriyagawa, Jun'ichi Tamaki

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

Nanoindentation tests were made on single-crystal InP at various loads using a pyramid-type diamond indenter, and the resulting indents were examined using SEM and TEM. The results suggest that dislocations along the <110> directions dominate the deformation mechanism, where no phase transformation occurs. Indentation caused high-density dislocation regions below which are slip bands. The indentation mechanism was simulated by finite element method (FEM), and the simulation results were compared with the experimental results. Diamond turning experiments were also conducted to examine the ductile machining characteristics. The surface texture was found to change significantly with workpiece crystal orientations. The critical undeformed chip thickness for completely ductile-cut surfaces was measured and smooth surfaces were obtained with generating continuous ductile chips.

Original languageEnglish
Title of host publicationProceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006
Publishereuspen
Pages276-279
Number of pages4
Volume2
ISBN (Print)0955308208, 9780955308208
Publication statusPublished - 2006
Externally publishedYes
Event6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006 - Baden bei Wien, Vienna, Austria
Duration: 2006 May 282006 Jun 1

Other

Other6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006
CountryAustria
CityBaden bei Wien, Vienna
Period06/5/2806/6/1

Fingerprint

Diamond
Nanoindentation
nanoindentation
Diamonds
diamonds
Semiconductor materials
indentation
Indentation
chips
edge dislocations
pyramids
machining
Crystal orientation
phase transformations
Machining
finite element method
textures
Textures
Phase transitions
Single crystals

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Materials Science(all)
  • Mechanical Engineering
  • Instrumentation
  • Environmental Engineering

Cite this

Yan, J., Zhao, H., Kuriyagawa, T., & Tamaki, J. (2006). Nanoindentation and diamond turning tests on compound semiconductor InP. In Proceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006 (Vol. 2, pp. 276-279). euspen.

Nanoindentation and diamond turning tests on compound semiconductor InP. / Yan, Jiwang; Zhao, Hongwei; Kuriyagawa, Tsunemoto; Tamaki, Jun'ichi.

Proceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006. Vol. 2 euspen, 2006. p. 276-279.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yan, J, Zhao, H, Kuriyagawa, T & Tamaki, J 2006, Nanoindentation and diamond turning tests on compound semiconductor InP. in Proceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006. vol. 2, euspen, pp. 276-279, 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006, Baden bei Wien, Vienna, Austria, 06/5/28.
Yan J, Zhao H, Kuriyagawa T, Tamaki J. Nanoindentation and diamond turning tests on compound semiconductor InP. In Proceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006. Vol. 2. euspen. 2006. p. 276-279
Yan, Jiwang ; Zhao, Hongwei ; Kuriyagawa, Tsunemoto ; Tamaki, Jun'ichi. / Nanoindentation and diamond turning tests on compound semiconductor InP. Proceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006. Vol. 2 euspen, 2006. pp. 276-279
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