TY - GEN
T1 - Nanoindentation and diamond turning tests on compound semiconductor InP
AU - Yan, Jiwang
AU - Zhao, Hongwei
AU - Kuriyagawa, Tsunemoto
AU - Tamaki, Jun'ichi
PY - 2006/1/1
Y1 - 2006/1/1
N2 - Nanoindentation tests were made on single-crystal InP at various loads using a pyramid-type diamond indenter, and the resulting indents were examined using SEM and TEM. The results suggest that dislocations along the <110> directions dominate the deformation mechanism, where no phase transformation occurs. Indentation caused high-density dislocation regions below which are slip bands. The indentation mechanism was simulated by finite element method (FEM), and the simulation results were compared with the experimental results. Diamond turning experiments were also conducted to examine the ductile machining characteristics. The surface texture was found to change significantly with workpiece crystal orientations. The critical undeformed chip thickness for completely ductile-cut surfaces was measured and smooth surfaces were obtained with generating continuous ductile chips.
AB - Nanoindentation tests were made on single-crystal InP at various loads using a pyramid-type diamond indenter, and the resulting indents were examined using SEM and TEM. The results suggest that dislocations along the <110> directions dominate the deformation mechanism, where no phase transformation occurs. Indentation caused high-density dislocation regions below which are slip bands. The indentation mechanism was simulated by finite element method (FEM), and the simulation results were compared with the experimental results. Diamond turning experiments were also conducted to examine the ductile machining characteristics. The surface texture was found to change significantly with workpiece crystal orientations. The critical undeformed chip thickness for completely ductile-cut surfaces was measured and smooth surfaces were obtained with generating continuous ductile chips.
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M3 - Conference contribution
AN - SCOPUS:66349118638
T3 - Proceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006
SP - 276
EP - 279
BT - Proceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006
A2 - Zervos, H.
PB - euspen
T2 - 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006
Y2 - 28 May 2006 through 1 June 2006
ER -