Nanoindentation tests on diamond-machined silicon wafers

Jiwang Yan, Hirokazu Takahashi, Jun'ichi Tamaki, Xiaohui Gai, Hirofumi Harada, John Patten

Research output: Contribution to journalArticlepeer-review

59 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Nanoindentation tests on diamond-machined silicon wafers'. Together they form a unique fingerprint.

Physics & Astronomy