Nanoparticle generation from various types of silicon materials by nanosecond-pulsed laser irradiation

Ko Momoki, Jiwang Yan

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

A huge amount of silicon sludge is disposed of from silicon wafer manufacture, and its reuse is a critical issue. In this study, silicon nanoparticle generation from sludge was explored by nanosecond-pulsed laser irradiation. The nanoparticle production efficiency from silicon sludge was compared with that from silicon wafers. The result showed that using silicon sludge as a laser irradiation target leads to a distinctly higher production efficiency of nanoparticles; the smaller the powder size of the silicon sludge, the higher the efficiency. The generated silicon nanoparticles were crystalline with sizes at the 10 nm level.

Original languageEnglish
Article number026505
JournalApplied Physics Express
Volume13
Issue number2
DOIs
Publication statusPublished - 2020 Feb 1

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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