Nanoparticle-sintered BaTiO3 thin films and its orientation control by solid phase epitaxy

Fumi Nakasone, Keisuke Kobayashi, Toshimasa Suzuki, Youichi Mizuno, Hirokazu Chazono, Hiroaki Imai

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)


A novel powder-sintering thin-film process using nanocrystals of sol-gel-derived BaTiO3 without sintering additives yields a highly densified microstructure containing columnar grains at low temperatures of 800°C. The BaTiO3 thin film fabricated on a (111)-oriented Pt/TiO2/Al2O3 substrate shows high crystallinity and a relatively high dielectric constant of 635 at 10 kHz with a low loss tangent of 0.007. Furthermore, the controllability of the crystallographic orientations of thin films by solid phase epitaxy is demonstrated on the basis of the optimization of surface nucleation and the subsequent grain growth on epitaxially grown platinum electrodes and single-crystal SrTiO3 substrates.

Original languageEnglish
Pages (from-to)8518-8524
Number of pages7
JournalJapanese journal of applied physics
Issue number11
Publication statusPublished - 2008 Nov 14


  • BaTiO
  • Capacitor
  • Nanocrystal
  • Solid phase epitaxy
  • Thin film

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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