Nanoscale motion control using composite filter for disturbance observer

Fumito Nishi, Seiichiro Katsura

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Nanoscale motion control is required for the miniaturization and performance improvement of mechatronic systems. In motion control at the nanometer scale, disturbances that do not affect the system at the macro scale might greatly influence the control performance. The torque ripple caused by current distortion is one of the most serious disturbance elements and should be eliminated. Compensation methods for current distortion have been researched, but the conventional method cannot be applied to control systems in the nanometer scale because a short sampling time is needed. To address this problem, a filter design method is proposed in this paper. The effect of the current distortion can be reduced by designing the filter in the disturbance observer to have a low-pass filter and a band-stop filter. By using high-precision acceleration control based on the proposed method, persistent oscillation can be suppressed, and control accuracy can be improved. The validity of the proposal is comfirmed by experiments.

Original languageEnglish
Pages (from-to)98-104
Number of pages7
JournalIEEJ Journal of Industry Applications
Volume4
Issue number2
DOIs
Publication statusPublished - 2015

Fingerprint

Motion control
Composite materials
Acceleration control
Wave filters
Mechatronics
Low pass filters
Macros
Torque
Sampling
Control systems
Experiments

Keywords

  • Disturbance observer
  • Motion control
  • Nanoscale positioning

ASJC Scopus subject areas

  • Energy Engineering and Power Technology
  • Automotive Engineering
  • Electrical and Electronic Engineering
  • Industrial and Manufacturing Engineering
  • Mechanical Engineering

Cite this

Nanoscale motion control using composite filter for disturbance observer. / Nishi, Fumito; Katsura, Seiichiro.

In: IEEJ Journal of Industry Applications, Vol. 4, No. 2, 2015, p. 98-104.

Research output: Contribution to journalArticle

@article{9ff30486c3ec4dc6848b5e4ca270f12e,
title = "Nanoscale motion control using composite filter for disturbance observer",
abstract = "Nanoscale motion control is required for the miniaturization and performance improvement of mechatronic systems. In motion control at the nanometer scale, disturbances that do not affect the system at the macro scale might greatly influence the control performance. The torque ripple caused by current distortion is one of the most serious disturbance elements and should be eliminated. Compensation methods for current distortion have been researched, but the conventional method cannot be applied to control systems in the nanometer scale because a short sampling time is needed. To address this problem, a filter design method is proposed in this paper. The effect of the current distortion can be reduced by designing the filter in the disturbance observer to have a low-pass filter and a band-stop filter. By using high-precision acceleration control based on the proposed method, persistent oscillation can be suppressed, and control accuracy can be improved. The validity of the proposal is comfirmed by experiments.",
keywords = "Disturbance observer, Motion control, Nanoscale positioning",
author = "Fumito Nishi and Seiichiro Katsura",
year = "2015",
doi = "10.1541/ieejjia.4.98",
language = "English",
volume = "4",
pages = "98--104",
journal = "IEEJ Journal of Industry Applications",
issn = "2187-1094",
publisher = "The Institute of Electrical Engineers of Japan",
number = "2",

}

TY - JOUR

T1 - Nanoscale motion control using composite filter for disturbance observer

AU - Nishi, Fumito

AU - Katsura, Seiichiro

PY - 2015

Y1 - 2015

N2 - Nanoscale motion control is required for the miniaturization and performance improvement of mechatronic systems. In motion control at the nanometer scale, disturbances that do not affect the system at the macro scale might greatly influence the control performance. The torque ripple caused by current distortion is one of the most serious disturbance elements and should be eliminated. Compensation methods for current distortion have been researched, but the conventional method cannot be applied to control systems in the nanometer scale because a short sampling time is needed. To address this problem, a filter design method is proposed in this paper. The effect of the current distortion can be reduced by designing the filter in the disturbance observer to have a low-pass filter and a band-stop filter. By using high-precision acceleration control based on the proposed method, persistent oscillation can be suppressed, and control accuracy can be improved. The validity of the proposal is comfirmed by experiments.

AB - Nanoscale motion control is required for the miniaturization and performance improvement of mechatronic systems. In motion control at the nanometer scale, disturbances that do not affect the system at the macro scale might greatly influence the control performance. The torque ripple caused by current distortion is one of the most serious disturbance elements and should be eliminated. Compensation methods for current distortion have been researched, but the conventional method cannot be applied to control systems in the nanometer scale because a short sampling time is needed. To address this problem, a filter design method is proposed in this paper. The effect of the current distortion can be reduced by designing the filter in the disturbance observer to have a low-pass filter and a band-stop filter. By using high-precision acceleration control based on the proposed method, persistent oscillation can be suppressed, and control accuracy can be improved. The validity of the proposal is comfirmed by experiments.

KW - Disturbance observer

KW - Motion control

KW - Nanoscale positioning

UR - http://www.scopus.com/inward/record.url?scp=84978684849&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84978684849&partnerID=8YFLogxK

U2 - 10.1541/ieejjia.4.98

DO - 10.1541/ieejjia.4.98

M3 - Article

AN - SCOPUS:84978684849

VL - 4

SP - 98

EP - 104

JO - IEEJ Journal of Industry Applications

JF - IEEJ Journal of Industry Applications

SN - 2187-1094

IS - 2

ER -