Nanoscale surface patterning of diamond utilizing carbon diffusion reaction with a microstructured titanium mold

Jiwang Yan, Yuji Imoto

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)

Abstract

A novel method was proposed for generating nanoscale surface patterns on single-crystal diamond by carbon diffusion with a microstructured titanium mold under controlled temperature and pressure. The depth, geometry, and surface integrity of the fabricated patterns were investigated by laser micro-Raman spectroscopy and white-light interferometry, and the titanium molds were analyzed by energy dispersive X-ray spectroscopy. The results showed that at specific temperatures and pressures, three-dimensional patterns with a depth of tens of nanometers and sloped/curved walls could be generated on a diamond surface after a few minutes, without causing any surface graphitization. The intensity profile and penetration depth of carbon atoms into the titanium were experimentally measured.

Original languageEnglish
Pages (from-to)181-184
Number of pages4
JournalCIRP Annals
Volume67
Issue number1
DOIs
Publication statusPublished - 2018 Jan 1

Keywords

  • Diamond
  • Nanostructure
  • Surface integrity

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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