TY - GEN
T1 - Needle Type Pressure Sensor with Parylene Membrane and Silicone Oil Inside
AU - Kishimoto, Takuto
AU - Takahashi, Hidetoshi
N1 - Funding Information:
This study was supported by JSPS KAKENHI Grant Number 20H02102.
Publisher Copyright:
© 2022 IEEE.
PY - 2022
Y1 - 2022
N2 - This study presents a pressure sensor that can measure the pressure inside the human body. In the medical field, many pressure sensors have been developed for therapeutic applications. However, these pressure sensors require the whole sensor body to be put into the inside of the patient via surgical operations so that the measurement physically burdens patients. Here, we propose a needle-type pressure sensor with a built-in piezoresistive cantilever. The proposed sensor has a needle part with a thin membrane on the tip and is filled with incompressible liquid inside. By ply inserting a needle part into a target, we can measure the body fluid pressure with minimal invasiveness. The resistance of the built-in piezoresistive cantilever varies according to the pressure change applied to the needle tip. Because the fabricated sensor responded to pseudo body pressure, it was suggested that the fabricated needle-type pressure sensor could detect pressure change inside the body.
AB - This study presents a pressure sensor that can measure the pressure inside the human body. In the medical field, many pressure sensors have been developed for therapeutic applications. However, these pressure sensors require the whole sensor body to be put into the inside of the patient via surgical operations so that the measurement physically burdens patients. Here, we propose a needle-type pressure sensor with a built-in piezoresistive cantilever. The proposed sensor has a needle part with a thin membrane on the tip and is filled with incompressible liquid inside. By ply inserting a needle part into a target, we can measure the body fluid pressure with minimal invasiveness. The resistance of the built-in piezoresistive cantilever varies according to the pressure change applied to the needle tip. Because the fabricated sensor responded to pseudo body pressure, it was suggested that the fabricated needle-type pressure sensor could detect pressure change inside the body.
KW - Needle-type medical pressure sensor
KW - parylene deposition
KW - piezoresistive cantilever
UR - http://www.scopus.com/inward/record.url?scp=85126393263&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85126393263&partnerID=8YFLogxK
U2 - 10.1109/MEMS51670.2022.9699579
DO - 10.1109/MEMS51670.2022.9699579
M3 - Conference contribution
AN - SCOPUS:85126393263
T3 - IEEE Symposium on Mass Storage Systems and Technologies
SP - 668
EP - 671
BT - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
PB - IEEE Computer Society
T2 - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Y2 - 9 January 2022 through 13 January 2022
ER -