An electro-conjugate fluid (ECF) generates jet flow in inhomogeneous electric field. Electro-rheological fluid (ERF) and magneto-rheological fluid (MRF) change their apparent viscosities in electric or magnetic field. Such functional fluids are expected to realize new promising actuators with simple and miniaturizable structure without sliding part. The paper describes objective and outline of our research on new microactuators using functional fluids. Then, as some results of our research, ECF micromotors, ECF gyroscopes, soft actuators using pressure due to ECF jet, forced liquid cooling systems using ECF jet, microactuators using ERF/MRF, and high output power piezoelectric micropumps are described briefly.
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