Non-catalytic growth of graphene-like thin film near pattern edges fabricated on SiO2 substrates

Satoru Suzuki; Yoshihiro Kobayashi; Tomoyuki Mizuno; Hideyuki Maki

doi:10.1016/j.tsf.2010.02.027

Non-catalytic growth of graphene-like thin film near pattern edges fabricated on SiO₂ substrates

Satoru Suzuki, Yoshihiro Kobayashi, Tomoyuki Mizuno, Hideyuki Maki

Department of Applied Physics and Physico-Informatics

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

Graphene-like thin films were grown on patterned SiO₂ substrates by simple thermal chemical vapor deposition using ethanol. The film growth occurred preferentially in the vicinity of pattern edges. Catalytic metal is not necessary for the substrate or the pattern. The films consist of graphitic nanocrystals of several nanometer scale. In the electric properties, the field effect is observed at room temperature.

Original language	English
Pages (from-to)	5040-5043
Number of pages	4
Journal	Thin Solid Films
Volume	518
Issue number	18
DOIs	https://doi.org/10.1016/j.tsf.2010.02.027
Publication status	Published - 2010 Jul 1

Keywords

Carbon
Chemical vapor deposition
Electrical properties and measurements
Raman scattering
Scanning electron microscopy

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

Access to Document

10.1016/j.tsf.2010.02.027

Cite this

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abstract = "Graphene-like thin films were grown on patterned SiO2 substrates by simple thermal chemical vapor deposition using ethanol. The film growth occurred preferentially in the vicinity of pattern edges. Catalytic metal is not necessary for the substrate or the pattern. The films consist of graphitic nanocrystals of several nanometer scale. In the electric properties, the field effect is observed at room temperature.",

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AU - Maki, Hideyuki

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KW - Chemical vapor deposition

KW - Electrical properties and measurements

KW - Raman scattering

KW - Scanning electron microscopy

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