Non-equilibrium plasmas in telecommunication related technologies

Z. L.J. Petrović, Z. M. Raspopović, T. Makabe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We give a review of some of the advances in modeling of ionized gases and their implications in telecommunications. In particular we discuss the gas breakdown due to RF and microwave fields, the multipacting discharges and the RF discharges used for integrated circuit processing.

Original languageEnglish
Title of host publication5th International Conference on Telecommunications in Modern Satellite, Cable and Broadcasting Service, TELSIKS 2001 - Proceedings of Papers
PublisherIEEE Computer Society
Pages371-380
Number of pages10
ISBN (Print)078037228X, 9780780372283
DOIs
Publication statusPublished - 2001 Jan 1
Event5th International Conference on Telecommunications in Modern Satellite, Cable and Broadcasting Service, TELSIKS 2001 - Nis, Serbia
Duration: 2001 Sep 192001 Sep 21

Publication series

Name5th International Conference on Telecommunications in Modern Satellite, Cable and Broadcasting Service, TELSIKS 2001 - Proceedings of Papers
Volume2

Other

Other5th International Conference on Telecommunications in Modern Satellite, Cable and Broadcasting Service, TELSIKS 2001
CountrySerbia
CityNis
Period01/9/1901/9/21

Keywords

  • atmosphere
  • electron swarms
  • gas breakdown
  • gas discharges
  • integrated circuit technologies
  • multipacting discharges
  • plasma
  • plasma processing
  • transport coefficients

ASJC Scopus subject areas

  • Computer Networks and Communications

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  • Cite this

    Petrović, Z. L. J., Raspopović, Z. M., & Makabe, T. (2001). Non-equilibrium plasmas in telecommunication related technologies. In 5th International Conference on Telecommunications in Modern Satellite, Cable and Broadcasting Service, TELSIKS 2001 - Proceedings of Papers (pp. 371-380). [955801] (5th International Conference on Telecommunications in Modern Satellite, Cable and Broadcasting Service, TELSIKS 2001 - Proceedings of Papers; Vol. 2). IEEE Computer Society. https://doi.org/10.1109/TELSKS.2001.955801