@inproceedings{2ed9cbaf10d446d3bb7f9ebe451992a9,
title = "Non-equilibrium plasmas in telecommunication related technologies",
abstract = "We give a review of some of the advances in modeling of ionized gases and their implications in telecommunications. In particular we discuss the gas breakdown due to RF and microwave fields, the multipacting discharges and the RF discharges used for integrated circuit processing.",
keywords = "atmosphere, electron swarms, gas breakdown, gas discharges, integrated circuit technologies, multipacting discharges, plasma, plasma processing, transport coefficients",
author = "Petrovi{\'c}, {Z. L.J.} and Raspopovi{\'c}, {Z. M.} and T. Makabe",
year = "2001",
month = jan,
day = "1",
doi = "10.1109/TELSKS.2001.955801",
language = "English",
isbn = "078037228X",
series = "5th International Conference on Telecommunications in Modern Satellite, Cable and Broadcasting Service, TELSIKS 2001 - Proceedings of Papers",
publisher = "IEEE Computer Society",
pages = "371--380",
booktitle = "5th International Conference on Telecommunications in Modern Satellite, Cable and Broadcasting Service, TELSIKS 2001 - Proceedings of Papers",
note = "5th International Conference on Telecommunications in Modern Satellite, Cable and Broadcasting Service, TELSIKS 2001 ; Conference date: 19-09-2001 Through 21-09-2001",
}