Non-photolithographic manufacturing processes for micro-channels functioned by micro-contact-printed SAMs

Saigusa Hiroki, Suga Yasuo, Norihisa Miki

Research output: Contribution to journalArticle

Abstract

In this paper we propose non-photolithographic fabrication processes of micro-fluid channels with patterned SAMs (Self-Assembled-Monolayers). SAMs with a thiol group are micro-contact printed on a patterned Au/Ti layer, which is vapor-deposited through a shadow mask. Ti is an adhesion layer. Subsequently, the micro-channels are formed by bonding surface-activated PDMS onto the silicon substrate via a silanol group, producing a SAMs-functioned bottom wall of the micro-channel. No photolithographic processes are necessary and thus, the proposed processes are very simple, quick and low cost The micro-reactors can have various functions associated with the micro-contact-printed SAMs. We demonstrate successful manufacturing of micro-reactors with two types of SAMs. The micro-reactor with patterned AUT (11-amino-1-undecanethiol) successfully trapped nano-particles with a carboxylic acid group, indicating that micro-contact-printed SAMs remain active after the manufacturing processes of the micro-reactor. AUT -functioned micro-channels are applicable to bioassay and to immobilize proteins for DNA arrays. ODT (1-octadecanethiol) makes surfaces hydrophobic with the methyl terminal group. When water was introduced into the micro-reactor with ODT-patterned surfaces, water droplets remained only in the hydrophilic areas where ODT was not patterned. ODT -functioned micro-channels are applicable to fluid handling.

Original languageEnglish
Pages (from-to)603-606
Number of pages4
JournalIEEJ Transactions on Sensors and Micromachines
Volume126
Issue number11
DOIs
Publication statusPublished - 2006

Fingerprint

Self assembled monolayers
Fluids
Bioassay
Surface waters
Carboxylic acids
Masks
DNA
Adhesion
Vapors
Proteins
Fabrication
Silicon
Substrates
Costs
Water

Keywords

  • Micro-contact printing
  • Micro-reactor
  • Micro-TAS
  • SAMs

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Non-photolithographic manufacturing processes for micro-channels functioned by micro-contact-printed SAMs. / Hiroki, Saigusa; Yasuo, Suga; Miki, Norihisa.

In: IEEJ Transactions on Sensors and Micromachines, Vol. 126, No. 11, 2006, p. 603-606.

Research output: Contribution to journalArticle

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