Nonlinear vibration of electrostatic MEMS under DC and AC applied voltage

Hikaru Takamatsu, Toshihiko Sugiura

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

Application of electrostatic actuators to MEMS is expected. It is important to evaluate nonlinear properties caused by electrostatic forces which are dominant in MEMS. In this research a beam-type electrostatic actuator is modeled by a spring-mass system. Its dynamical characteristics were analytically and numerically investigated in terms of nonlinearity, bifurcation and stability. It was found that nonlinear resonance appears under DC and AC applied voltage, and it may be due to the forced vibration and also parametric resonance.

Original languageEnglish
Title of host publicationProceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
Pages423-424
Number of pages2
DOIs
Publication statusPublished - 2005 Dec 1
Event2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005 - Banff, Alberta, Canada
Duration: 2006 Jul 242006 Jul 27

Publication series

NameProceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005

Other

Other2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
CountryCanada
CityBanff, Alberta
Period06/7/2406/7/27

ASJC Scopus subject areas

  • Engineering(all)

Fingerprint Dive into the research topics of 'Nonlinear vibration of electrostatic MEMS under DC and AC applied voltage'. Together they form a unique fingerprint.

  • Cite this

    Takamatsu, H., & Sugiura, T. (2005). Nonlinear vibration of electrostatic MEMS under DC and AC applied voltage. In Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005 (pp. 423-424). [1540868] (Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005). https://doi.org/10.1109/ICMENS.2005.89