Nonlinear vibration of electrostatic MEMS under DC and AC applied voltage

Hikaru Takamatsu, Toshihiko Sugiura

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

Application of electrostatic actuators to MEMS is expected. It is important to evaluate nonlinear properties caused by electrostatic forces which are dominant in MEMS. In this research a beam-type electrostatic actuator is modeled by a spring-mass system. Its dynamical characteristics were analytically and numerically investigated in terms of nonlinearity, bifurcation and stability. It was found that nonlinear resonance appears under DC and AC applied voltage, and it may be due to the forced vibration and also parametric resonance.

Original languageEnglish
Title of host publicationProceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
Pages423-424
Number of pages2
DOIs
Publication statusPublished - 2005
Event2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005 - Banff, Alberta, Canada
Duration: 2006 Jul 242006 Jul 27

Other

Other2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005
CountryCanada
CityBanff, Alberta
Period06/7/2406/7/27

Fingerprint

Electrostatic actuators
MEMS
Electrostatics
Electrostatic force
Electric potential
Vibrations (mechanical)

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Takamatsu, H., & Sugiura, T. (2005). Nonlinear vibration of electrostatic MEMS under DC and AC applied voltage. In Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005 (pp. 423-424). [1540868] https://doi.org/10.1109/ICMENS.2005.89

Nonlinear vibration of electrostatic MEMS under DC and AC applied voltage. / Takamatsu, Hikaru; Sugiura, Toshihiko.

Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005. 2005. p. 423-424 1540868.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Takamatsu, H & Sugiura, T 2005, Nonlinear vibration of electrostatic MEMS under DC and AC applied voltage. in Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005., 1540868, pp. 423-424, 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005, Banff, Alberta, Canada, 06/7/24. https://doi.org/10.1109/ICMENS.2005.89
Takamatsu H, Sugiura T. Nonlinear vibration of electrostatic MEMS under DC and AC applied voltage. In Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005. 2005. p. 423-424. 1540868 https://doi.org/10.1109/ICMENS.2005.89
Takamatsu, Hikaru ; Sugiura, Toshihiko. / Nonlinear vibration of electrostatic MEMS under DC and AC applied voltage. Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005. 2005. pp. 423-424
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