Numerical analysis of ion dynamics in RF ICP discharge

K. Nishida, S. Mattei, W. Kobayashi, J. Lettry, Akiyoshi Hatayama

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have worked on the development of a particle-based numerical model of a hydrogen Radio Frequency (RF) Inductively Coupled Plasma (ICP). In the previous work, it has been shown that the model is able to simulate the E-to-H discharge mode transition, which is one of the distinct features of RF ICP. The purpose of the present study is to investigate the E-to-H discharge mode transition of the hydrogen RF ICP by our numerical model. In particular, the spatiotemporal behavior of ions, which we have not investigated in the previous work, will be presented in this paper.

Original languageEnglish
Title of host publicationProceedings of the 17th International Conference on Ion Sources
EditorsEdgar Mahner, Richard Scrivens, Richard Pardo, Jacques Lettry, Bruce Marsh
PublisherAmerican Institute of Physics Inc.
Volume2011
ISBN (Print)9780735417274
DOIs
Publication statusPublished - 2018 Sep 21
Event17th International Conference on Ion Sources 2018 - Geneva, Switzerland
Duration: 2017 Sep 152017 Sep 20

Other

Other17th International Conference on Ion Sources 2018
CountrySwitzerland
CityGeneva
Period17/9/1517/9/20

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ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Nishida, K., Mattei, S., Kobayashi, W., Lettry, J., & Hatayama, A. (2018). Numerical analysis of ion dynamics in RF ICP discharge. In E. Mahner, R. Scrivens, R. Pardo, J. Lettry, & B. Marsh (Eds.), Proceedings of the 17th International Conference on Ion Sources (Vol. 2011). [050014] American Institute of Physics Inc.. https://doi.org/10.1063/1.5053312