Numerical and experimental analysis of transient state micro-bounce of aerostatic guideways caused by small pores

Tojiro Aoyama, K. Koizumi, Yasuhiro Kakinuma, Y. Kobayashi

Research output: Contribution to journalArticle

18 Citations (Scopus)

Abstract

Aerostatic guideways have been applied to precision machine elements. Recently, downsizing and the increased use of high-density technology in IT devices have generated demand for higher accuracy in aerostatic guideways. It has been pointed out that the micro-bounce occurs when the slider passes over the aerostatic guideway with small pores. This transient state micro-vibration decreases the accuracy of aerostatic guideways and, thus, it is now expected to be suppressed. The purpose of this study is to analyze the micro-bounce mechanism of aerostatic guideways caused by pores, and to propose new designs for the suppression of micro-bounce.

Original languageEnglish
Pages (from-to)367-370
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Volume58
Issue number1
DOIs
Publication statusPublished - 2009

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Guideways

Keywords

  • Bearing
  • Design
  • Vibration

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

Cite this

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abstract = "Aerostatic guideways have been applied to precision machine elements. Recently, downsizing and the increased use of high-density technology in IT devices have generated demand for higher accuracy in aerostatic guideways. It has been pointed out that the micro-bounce occurs when the slider passes over the aerostatic guideway with small pores. This transient state micro-vibration decreases the accuracy of aerostatic guideways and, thus, it is now expected to be suppressed. The purpose of this study is to analyze the micro-bounce mechanism of aerostatic guideways caused by pores, and to propose new designs for the suppression of micro-bounce.",
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AU - Koizumi, K.

AU - Kakinuma, Yasuhiro

AU - Kobayashi, Y.

PY - 2009

Y1 - 2009

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AB - Aerostatic guideways have been applied to precision machine elements. Recently, downsizing and the increased use of high-density technology in IT devices have generated demand for higher accuracy in aerostatic guideways. It has been pointed out that the micro-bounce occurs when the slider passes over the aerostatic guideway with small pores. This transient state micro-vibration decreases the accuracy of aerostatic guideways and, thus, it is now expected to be suppressed. The purpose of this study is to analyze the micro-bounce mechanism of aerostatic guideways caused by pores, and to propose new designs for the suppression of micro-bounce.

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KW - Design

KW - Vibration

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