Numerical modeling of RF magnetron sputtering with metallic or dielectric target

T. Makabe, T. Yagisawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A self-consistent modeling of two-dimensional and temporal (2D-t) structures of RF magnetron plasma with a metallic (copper) and a dielectric (SiO2) target is performed at 5 mTorr in argon by using plasma hybrid model consisting of a particle-in-cell/Monte Carlo (PIC/MC) simulation for electrons and the relaxation continuum (RCT) model for ions. The erosion profiles of both targets are numerically predicted through the flux velocity distribution of ions incident on the surface. The mechanism of plasma maintenance in a dielectric target is quite different from that in a metallic one. Two major differences exist in an erosion profile between both targets. One is the presence of dual peaks in the erosion profile of the dielectric target. The other is the discrepancy in the position of the maxima between incident ion flux and erosion depth on the dielectric target. These are direct influences of the radially localized structure in an interfacial sheath based on the charge accumulation on a dielectric surface.

Original languageEnglish
Title of host publicationResearch Trends in Contemporary Materials Science - YUCOMAT VIII - Selected papers presented at the 8th Conference of the Yugoslav Materials Research Society
PublisherTrans Tech Publications Ltd
Pages65-71
Number of pages7
ISBN (Print)0878494413, 9780878494415
DOIs
Publication statusPublished - 2007 Jan 1
Event8th Conference of the Yugoslav Materials Research Society - Herceg Novi, Serbia
Duration: 2006 Sep 42006 Sep 8

Publication series

NameMaterials Science Forum
Volume555
ISSN (Print)0255-5476
ISSN (Electronic)1662-9752

Other

Other8th Conference of the Yugoslav Materials Research Society
CountrySerbia
CityHerceg Novi
Period06/9/406/9/8

Keywords

  • Physical sputtering
  • RF magnetron plasma
  • Target erosion profile

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Makabe, T., & Yagisawa, T. (2007). Numerical modeling of RF magnetron sputtering with metallic or dielectric target. In Research Trends in Contemporary Materials Science - YUCOMAT VIII - Selected papers presented at the 8th Conference of the Yugoslav Materials Research Society (pp. 65-71). (Materials Science Forum; Vol. 555). Trans Tech Publications Ltd. https://doi.org/10.4028/0-87849-441-3.65