TY - GEN
T1 - Numerical simulations of high heat dissipation technology in LSI 3-D packaging using carbon nanotube through silicon via (CNT-TSV) and thermal interface material (CNT-TIM)
AU - Kawanabe, Teppei
AU - Kawabata, Akio
AU - Murakami, Torno
AU - Nihei, Mizuhisa
AU - Awano, Yuji
PY - 2013/11/4
Y1 - 2013/11/4
N2 - We report numerical simulations of heat dissipation properties of nano-carbon through silicon via (TSV), thermal interface material (TIM), and chip package towards a high heat dissipation LSI 3-D packaging. By using vertically aligned multi-walled CNTs (MWNTs) as both TSV and TIM materials and graphite as chip package, a boundary temperature just under a heat source decreased 40.8K in total, comparing to that using conventional materials. This result suggests superior heat dissipation properties of nano-carbon 3-D packaging.
AB - We report numerical simulations of heat dissipation properties of nano-carbon through silicon via (TSV), thermal interface material (TIM), and chip package towards a high heat dissipation LSI 3-D packaging. By using vertically aligned multi-walled CNTs (MWNTs) as both TSV and TIM materials and graphite as chip package, a boundary temperature just under a heat source decreased 40.8K in total, comparing to that using conventional materials. This result suggests superior heat dissipation properties of nano-carbon 3-D packaging.
UR - http://www.scopus.com/inward/record.url?scp=84886689104&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84886689104&partnerID=8YFLogxK
U2 - 10.1109/IITC.2013.6615581
DO - 10.1109/IITC.2013.6615581
M3 - Conference contribution
AN - SCOPUS:84886689104
SN - 9781479904396
T3 - Proceedings of the 2013 IEEE International Interconnect Technology Conference, IITC 2013
BT - Proceedings of the 2013 IEEE International Interconnect Technology Conference, IITC 2013
T2 - 2013 16th IEEE International Interconnect Technology Conference, IITC 2013
Y2 - 13 June 2013 through 15 June 2013
ER -