Numerical study of a collision-dominated inductively coupled plasma using particle-in-cell/Monte Carlo simulation

Jin Sung Oh, Toshiaki Makabe

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The deposition of power into electrons and ions in a collision-dominated inductively coupled plasma has been investigated in Ar in a cylindrical reactor wound uniformly around it which has ribbon shaped current coil using particle-in-cell/Monte Carlo simulation. Electrons obtain energy from the temporally varying induced azimuthal field, while heavy ions are only slightly heated by the electrostatic radial field caused by a wall sheath in front of the reactor wall.

Original languageEnglish
Pages (from-to)4423-4428
Number of pages6
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume38
Issue number7 B
Publication statusPublished - 1999 Jul

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Inductively coupled plasma
reactors
collisions
Electrons
cells
Heavy ions
sheaths
ribbons
Electrostatics
heavy ions
coils
simulation
electron energy
electrostatics
Ions
ions
electrons
Monte Carlo simulation

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Cite this

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abstract = "The deposition of power into electrons and ions in a collision-dominated inductively coupled plasma has been investigated in Ar in a cylindrical reactor wound uniformly around it which has ribbon shaped current coil using particle-in-cell/Monte Carlo simulation. Electrons obtain energy from the temporally varying induced azimuthal field, while heavy ions are only slightly heated by the electrostatic radial field caused by a wall sheath in front of the reactor wall.",
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