Numerical study of the effects of frequency in inductively coupled plasma using particle-in-cell/Monte Carlo simulation

Jin Sung Oh, Toshiaki Makabe

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

The effects of induction frequency on inductively coupled plasma (ICP) have been investigated in a collision-dominated region in Ar under a constant dissipated power using the particle-in-cell/Monte Carlo (PIC/MC) simulation. The plasma density, potential, electron energy distribution and mean electron energy are discussed as a function of the applied frequencies of 6.78 MHz, 13.56 MHz, 27.12 MHz and 100 MHz at pressure of 100 mTorr and 300 mTorr.

Original languageEnglish
Pages (from-to)1358-1364
Number of pages7
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume39
Issue number3 A
DOIs
Publication statusPublished - 2000 Jan 1

Keywords

  • Electron energy distribution
  • ICP
  • Induction frequency
  • PIC/MCS
  • Temporal mean energy characteristics

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)

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